Evaporation method using infrared guiding heater
First Claim
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1. A method, comprising:
- (a) providing a target consisting of a solid organic material;
(b) heating a bulk of the solid organic material to a first temperature using a first heat source, the first temperature being below a sublimation temperature of the solid organic material;
(c) sublimating a localized portion of the target by selectively heating the localized portion to a second temperature at or above the sublimation temperature using a second heat source;
(d) transporting the sublimated organic material from the target to a substrate; and
(e) depositing the sublimated organic material over the substrate to form a layer comprising the solid organic material;
wherein the bulk is heated to the first temperature prior to sublimating the localized portion, and wherein the bulk is maintained at a temperature below the sublimation temperature of the solid organic material during sublimation.
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Abstract
A method for evaporating a solid organic material by sublimation using an infrared guiding heater which minimizes temperature gradients in the bulk of the organic target. The bulk is heated to a temperature below the sublimation temperature of the target. A localized area of the target is sublimated by the infrared guiding heater while regulating the temperature of the bulk. The vapor is then deposited over, and condensed on, a substrate to form a solid organic layer.
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11 Claims
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1. A method, comprising:
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(a) providing a target consisting of a solid organic material; (b) heating a bulk of the solid organic material to a first temperature using a first heat source, the first temperature being below a sublimation temperature of the solid organic material; (c) sublimating a localized portion of the target by selectively heating the localized portion to a second temperature at or above the sublimation temperature using a second heat source; (d) transporting the sublimated organic material from the target to a substrate; and (e) depositing the sublimated organic material over the substrate to form a layer comprising the solid organic material; wherein the bulk is heated to the first temperature prior to sublimating the localized portion, and wherein the bulk is maintained at a temperature below the sublimation temperature of the solid organic material during sublimation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification