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Process and apparatus for organic vapor jet deposition

  • US 7,431,968 B1
  • Filed: 09/04/2002
  • Issued: 10/07/2008
  • Est. Priority Date: 09/04/2001
  • Status: Expired due to Term
First Claim
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1. A method of depositing an organic film, comprising:

  • a) providing a heated non-reactive carrier gas transporting organic vapor;

    b) ejecting the heated non-reactive carrier gas transporting an organic vapor through a nozzle block, with a bulk flow velocity at least as great as the thermal velocity of the molecules, onto a cooled substrate separated from the nozzle block by not more than about 1500 microns, to form a patterned organic film, wherein the method is used to fabricate a patterned organic film without the use of a mask, and wherein the patterned organic film has a resolution of about 1 micron or less.

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