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Apparatus for determining cantilever parameters

  • US 7,434,445 B2
  • Filed: 06/26/2006
  • Issued: 10/14/2008
  • Est. Priority Date: 02/28/2001
  • Status: Expired due to Fees
First Claim
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1. An apparatus for determining cantilever parameters, comprising:

  • means for measuring a drag force acting on a cantilever by monitoring a deflection of the cantilever;

    means for determining a power spectrum of the cantilever;

    means for measuring motion of a base of the cantilever; and

    means for determining one or more characteristics of the cantilever based on the motion of the base, the power spectrum, and the cantilever deflection.

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