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Liquid crystal display device and method of manufacturing the same

  • US 7,435,631 B2
  • Filed: 12/29/2005
  • Issued: 10/14/2008
  • Est. Priority Date: 12/31/2004
  • Status: Active Grant
First Claim
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1. A method of manufacturing a liquid crystal display device (LCD), the method comprising:

  • forming a semiconductor layer and a first conductive material on a substrate and using a first diffraction mask to form an active layer containing the semiconductor layer and a stack of an active pattern and a first capacitor electrode containing the semiconductor layer and the first conductive material;

    forming a first insulating layer on the substrate;

    forming a second conductive material on the substrate and patterning the resulting structure to form a gate electrode and a second capacitor electrode;

    ion implanting the active layer to form a doped active layer;

    forming a second insulating layer and a photoresist on the doped active layer;

    forming first and second contact holes that penetrate the first and second insulating layers to expose the active layer;

    forming a third conductive material on the photoresist with the first and second contact holes to form first and second connection electrodes on the exposed active layer;

    forming a transparent conductive electrode material and a fourth conductive material on the second insulating layer; and

    using a second diffraction mask to form a pixel electrode and a stack of first and second transparent electrode patterns and source and drain electrodes.

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