Liquid crystal display device and method of manufacturing the same
First Claim
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1. A method of manufacturing a liquid crystal display device (LCD), the method comprising:
- forming a semiconductor layer and a first conductive material on a substrate and using a first diffraction mask to form an active layer containing the semiconductor layer and a stack of an active pattern and a first capacitor electrode containing the semiconductor layer and the first conductive material;
forming a first insulating layer on the substrate;
forming a second conductive material on the substrate and patterning the resulting structure to form a gate electrode and a second capacitor electrode;
ion implanting the active layer to form a doped active layer;
forming a second insulating layer and a photoresist on the doped active layer;
forming first and second contact holes that penetrate the first and second insulating layers to expose the active layer;
forming a third conductive material on the photoresist with the first and second contact holes to form first and second connection electrodes on the exposed active layer;
forming a transparent conductive electrode material and a fourth conductive material on the second insulating layer; and
using a second diffraction mask to form a pixel electrode and a stack of first and second transparent electrode patterns and source and drain electrodes.
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Abstract
An LCD and a method of manufacturing the same using at most six mask processes are provided. An active layer and a storage electrode are simultaneously formed by diffraction exposure. Multiple ion implantations are performed using a photoresist or the gate electrode to mask different areas of an underlying semiconductor. Source and drain electrodes and a pixel electrode are simultaneously formed by diffraction exposure. First and second connection electrodes that lower the contact resistance between the drain electrode and the active layer are formed by a lift-off process.
16 Citations
11 Claims
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1. A method of manufacturing a liquid crystal display device (LCD), the method comprising:
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forming a semiconductor layer and a first conductive material on a substrate and using a first diffraction mask to form an active layer containing the semiconductor layer and a stack of an active pattern and a first capacitor electrode containing the semiconductor layer and the first conductive material; forming a first insulating layer on the substrate; forming a second conductive material on the substrate and patterning the resulting structure to form a gate electrode and a second capacitor electrode; ion implanting the active layer to form a doped active layer; forming a second insulating layer and a photoresist on the doped active layer; forming first and second contact holes that penetrate the first and second insulating layers to expose the active layer; forming a third conductive material on the photoresist with the first and second contact holes to form first and second connection electrodes on the exposed active layer; forming a transparent conductive electrode material and a fourth conductive material on the second insulating layer; and using a second diffraction mask to form a pixel electrode and a stack of first and second transparent electrode patterns and source and drain electrodes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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