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Probe station having multiple enclosures

  • US 7,436,170 B2
  • Filed: 06/20/2007
  • Issued: 10/14/2008
  • Est. Priority Date: 06/06/1997
  • Status: Expired due to Fees
First Claim
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1. A probe station for probing a test device, said probe station comprising:

  • (a) a chuck having a laterally-extending supporting surface for supporting said test device;

    (b) a enclosure generally enclosing said supporting surface, said chuck being laterally movable relative to said enclosure;

    (c) said enclosure including a bendable wall interconnected with said chuck, said wall comprising bendably extensible and retractable material enabling said wall to bendably accommodate movement of said chuck in multiple lateral directions angularly disposed relative to each other so as to operably position said test device for probing, at least major portions of said bendable wall being composed of electrically-conductive material.

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