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Scanning examination apparatus, lens unit, and objective-lens adaptor

  • US 7,436,562 B2
  • Filed: 03/15/2006
  • Issued: 10/14/2008
  • Est. Priority Date: 03/23/2005
  • Status: Expired due to Fees
First Claim
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1. A scanning examination apparatus comprising:

  • a first light source;

    a light scanning unit configured to scan light from the first light source on a specimen;

    an objective lens configured to form an image of the light scanned in the light scanning unit at the specimen;

    a light-detecting unit configured to detect return light emitted from the specimen;

    a second light source configured to emit visible light;

    a deflecting optical element, disposed between the light scanning unit and the objective lens, for making visible light emitted from the second light source enter the objective lens along an optical axis of the objective lens; and

    a beam-shaping unit configured to form the visible light from the second light source, which is irradiated onto a surface of the specimen via the objective lens using the deflecting optical element, into a pattern that enables the optical axis of the objective lens to be indicated;

    wherein the deflecting optical element is formed of a mirror and is disposed so as to be insertable in and removable from between the light scanning unit and the objective lens.

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