Micromirrors and hinge structures for micromirror arrays in projection displays
First Claim
Patent Images
1. A projection system, comprising:
- an illumination system providing a incident light beam;
a spatial light modulator having an array of micromirrors, each of which comprises;
a circuitry substrate;
at least one hinge post directly attached to the circuitry substrate;
a deformable hinge disposed on the at least one hinge post; and
a mirror plate attached to the hinge on a side of the hinge closer to the circuitry substrate such that the mirror plate is operable to rotate on the circuitry substrate;
wherein the hinge and the mirror plate are formed in separate planes parallel to the circuitry substrate when the mirror plate is not deflected, and wherein the hinge plane is closer to the incident light beam than the mirror plate plane; and
an optical element for directing the light onto or away from the spatial light modulator.
4 Assignments
0 Petitions
Accused Products
Abstract
A spatial light modulator is disclosed, along with methods for making such a modulator. The spatial light modulator comprises an array of micromirrors each having a hinge and a micromirror plate held via a hinge on a substrate, the micromirror plate being attached to the hinge such that the micromirror plate can rotate along a rotation axis and the hinge structure is located between the micromirror plate and the light source. The mirror plate is formed between the hinge and the substrate on which the hinge is formed. As a result, the hinge is exposed to the incident light during the operation.
27 Citations
38 Claims
-
1. A projection system, comprising:
-
an illumination system providing a incident light beam; a spatial light modulator having an array of micromirrors, each of which comprises; a circuitry substrate; at least one hinge post directly attached to the circuitry substrate; a deformable hinge disposed on the at least one hinge post; and a mirror plate attached to the hinge on a side of the hinge closer to the circuitry substrate such that the mirror plate is operable to rotate on the circuitry substrate; wherein the hinge and the mirror plate are formed in separate planes parallel to the circuitry substrate when the mirror plate is not deflected, and wherein the hinge plane is closer to the incident light beam than the mirror plate plane; and an optical element for directing the light onto or away from the spatial light modulator. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
-
-
11. A projection system, comprising:
-
an illumination system providing a light beam; a spatial light modulator having an array of micromirrors, each of which comprises; a circuitry substrate; at least one hinge post directly mounted on the circuitry substrate; a deformable hinge disposed on the at least one hinge post; and a mirror plate attached to the hinge on a side of mirror plate closer to the circuitry substrate such that the mirror plate is operable to rotate on the circuitry substrate;
wherein the hinge and the mirror plate are located such that a portion of the mirror plate is underneath the hinge viewed along a direction of the light beam;an optical element; and a display target.
-
-
12. A projector, comprising:
-
a light source for providing a light beam; a condensing lens for condensing the light beam from the light source onto a spatial light modulator; said spatial light modulator, further comprising; a transmissive substrate that is transmissive to visible light; a first gap below the transmissive substrate; a hinge below the first gap; a second gap below the hinge; a mirror plate below the second gap and attached to the hinge; and a circuit substrate positioned below and spaced apart from the mirror plate; and a hinge post disposed below the first gap and on the circuit substrate, and contacting and supporting the hinge; a display target; and wherein the light beam impinges a surface of the mirror plate through the transmissive substrate on a same side as the hinge. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21)
-
-
22. A spatial light modulator, comprising:
-
an optically transmissive substrate; a semiconductor substrate having thereon a deflectable element; and the deflectable element comprising a mirror plate, a hinge which is disposed on a same side of the mirror plate as the optically transmissive substrate, and a hinge post disposed below a gap under the transmissive substrate, and on the semiconductor substrate, and contacting and supporting the hinge. - View Dependent Claims (23, 24, 25, 26, 27)
-
-
28. A spatial light modulator, comprising:
a circuit substrate having a deflectable element formed thereon, the deflectable element comprising a hinge which is disposed on the opposite side of the deflectable element as the circuit substrate, and comprising at least one hinge post connected to the hinge and directly mounted on the circuit substrate, and supporting the hinge over the circuit substrate.
-
29. A micromirror device, comprising:
-
a silicon substrate; a first gap above the silicon substrate; a mirror plate above the first gap; a second gap above the mirror plate; a hinge above the second gap, wherein the mirror plate is attached to the hinge such that the mirror plate can rotate relative to the silicon substrate; and a hinge post disposed on the silicon substrate, and extending from the silicon substrate through the first and second gaps, and contacting and supporting the hinge. - View Dependent Claims (30, 31, 32, 33)
-
-
34. A micromirror device, comprising:
-
a transmissive substrate that is transmissive to visible light; a first gap below the transmissive substrate; a hinge below the first gap; a second gap below the hinge; a mirror plate below the second gap, wherein the mirror plate is attached to the hinge such that the mirror plate can rotate relative to the transmissive substrate; a semiconductor substrate disposed below and spaced apart from the mirror plate; and one or more hinge posts disposed between and contacting the semiconductor substrate and the hinge. - View Dependent Claims (35, 36, 37)
-
-
38. A method of making a projector, comprising:
-
providing a light source, a collection lens, a projection lens and a display target; providing a spatial light modulator, wherein the spatial light modulator comprises; a transmissive substrate that is transmissive to visible light; a first gap below the transmissive substrate; a hinge below the first gap; a second gap below the hinge; a mirror plate below the second gap; a semiconductor substrate disposed below and spaced apart from the mirror plate; and one or more hinge posts disposed between and contacting the semiconductor substrate and the hinge; and arranging the spatial light modulator, the collection lens, the light source, the projection lens and the display target such that, a light beam from the light source is focused by the collection lens onto the mirror plate through the transmissive substrate, and reflected by the mirror plate, the reflected light being collected by the projection lens and projected onto the display target.
-
Specification