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Micromirrors and hinge structures for micromirror arrays in projection displays

  • US 7,436,572 B2
  • Filed: 08/25/2004
  • Issued: 10/14/2008
  • Est. Priority Date: 08/25/2004
  • Status: Active Grant
First Claim
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1. A projection system, comprising:

  • an illumination system providing a incident light beam;

    a spatial light modulator having an array of micromirrors, each of which comprises;

    a circuitry substrate;

    at least one hinge post directly attached to the circuitry substrate;

    a deformable hinge disposed on the at least one hinge post; and

    a mirror plate attached to the hinge on a side of the hinge closer to the circuitry substrate such that the mirror plate is operable to rotate on the circuitry substrate;

    wherein the hinge and the mirror plate are formed in separate planes parallel to the circuitry substrate when the mirror plate is not deflected, and wherein the hinge plane is closer to the incident light beam than the mirror plate plane; and

    an optical element for directing the light onto or away from the spatial light modulator.

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