Electrical connections in microelectromechanical devices
First Claim
Patent Images
1. A micromirror array device, comprising:
- a substrate;
a post on the substrate, the post comprising an electrically conductive post layer;
a deformable hinge held by the post on the substrate, the hinge comprising an electrically conductive hinge layer, wherein the electrically conductive hinge layer is electrically connected to the electrically conductive post layer of the post; and
a reflective and deflectable mirror plate attached to the deformable hinge such that the mirror plate is capable of rotating relative the substrate, said mirror plate comprising an electrically conductive mirror plate layer that is electrically connected to the electrically conductive hinge layer;
wherein at least one of the post, hinge or mirror plate further comprises an electrically insulating layer that is patterned so as to allow electrical connection to the electrically conductive layer of the another one of the post, hinge or mirror plate.
3 Assignments
0 Petitions
Accused Products
Abstract
A micromirror device and a method of making the same are disclosed herein. The micromirror device comprises a mirror plate, hinge, and post each having an electrically conductive layer. One of the hinge, mirror plate, and post further comprises an electrically insulating layer. To enable the electrical connections between the conducting layers of the hinge, mirror plate, and post, the insulating layer is patterned.
72 Citations
38 Claims
-
1. A micromirror array device, comprising:
-
a substrate; a post on the substrate, the post comprising an electrically conductive post layer; a deformable hinge held by the post on the substrate, the hinge comprising an electrically conductive hinge layer, wherein the electrically conductive hinge layer is electrically connected to the electrically conductive post layer of the post; and a reflective and deflectable mirror plate attached to the deformable hinge such that the mirror plate is capable of rotating relative the substrate, said mirror plate comprising an electrically conductive mirror plate layer that is electrically connected to the electrically conductive hinge layer; wherein at least one of the post, hinge or mirror plate further comprises an electrically insulating layer that is patterned so as to allow electrical connection to the electrically conductive layer of the another one of the post, hinge or mirror plate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38)
-
Specification