Delivery systems for efficient vaporization of precursor source material
First Claim
1. A vapor delivery system for vaporization and delivery of a vaporized source material comprising a vaporization vessel enclosing an interior volume, wherein the vaporization vessel comprises a heater for vaporizing a source material;
- an inlet port for introducing a source material and an outlet port for discharging vaporized source material;
a processing tool positioned downstream from the vaporization vessel;
a connecting vapor line positioned between the vaporization vessel and processing tool and in fluid communication therewith; and
additionally at least one flow control feature comprising;
a) a mass flow controller in fluid communication with the connecting vapor line to provide a controlled flow of vaporized source material from the vaporization vessel to the processing tool;
b) a constant flow control valve in fluid communication with the connecting vapor line, wherein the control valve has an orifice sized to provide a controlled and constant flow of vaporized source material to the processing tool via the connecting vapor line;
c) an adjustable needle valve connected to the outlet port of the vaporization vessel, wherein the opening of the needle valve is continuously adjusted based on the vapor pressure within the vaporization vessel to provide a controlled and constant flow of vaporized source material to the processing tool via the connecting vapor line;
d) a Knudsen cell structure integral to the vaporization vessel or connected to the outlet port of the vaporization vessel, wherein the Knudsen cell has an orifice sized to provide a controlled and constant flow of vaporized source material to processing tool via the connecting vapor line;
e) a syringe system for accurately delivering a controlled amount of a liquid source material into the vaporization vessel for vaporization therein;
orf) a screw delivery device for accurately delivering a solid source material into the vaporization vessel for vaporization therein.
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Accused Products
Abstract
A delivery system for vaporizing and delivering vaporized solid and liquid precursor materials at a controlled rate having particular utility for semiconductor manufacturing applications. The system includes a vaporization vessel, a processing tool and a connecting vapor line therebetween, where the system further includes an input flow controller and/or an output flow controller to provide a controlled delivery of a vaporizable source material to the vaporization vessel and a controlled flow rate of vaporized source material to the processing tool.
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Citations
20 Claims
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1. A vapor delivery system for vaporization and delivery of a vaporized source material comprising a vaporization vessel enclosing an interior volume, wherein the vaporization vessel comprises a heater for vaporizing a source material;
- an inlet port for introducing a source material and an outlet port for discharging vaporized source material;
a processing tool positioned downstream from the vaporization vessel;
a connecting vapor line positioned between the vaporization vessel and processing tool and in fluid communication therewith; and
additionally at least one flow control feature comprising;a) a mass flow controller in fluid communication with the connecting vapor line to provide a controlled flow of vaporized source material from the vaporization vessel to the processing tool; b) a constant flow control valve in fluid communication with the connecting vapor line, wherein the control valve has an orifice sized to provide a controlled and constant flow of vaporized source material to the processing tool via the connecting vapor line; c) an adjustable needle valve connected to the outlet port of the vaporization vessel, wherein the opening of the needle valve is continuously adjusted based on the vapor pressure within the vaporization vessel to provide a controlled and constant flow of vaporized source material to the processing tool via the connecting vapor line; d) a Knudsen cell structure integral to the vaporization vessel or connected to the outlet port of the vaporization vessel, wherein the Knudsen cell has an orifice sized to provide a controlled and constant flow of vaporized source material to processing tool via the connecting vapor line; e) a syringe system for accurately delivering a controlled amount of a liquid source material into the vaporization vessel for vaporization therein;
orf) a screw delivery device for accurately delivering a solid source material into the vaporization vessel for vaporization therein. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
- an inlet port for introducing a source material and an outlet port for discharging vaporized source material;
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11. A vapor delivery system for vaporization delivery of a vaporized source material, comprising:
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a) a vaporization vessel for holding a vaporizable source material comprising an input port for introducing a source material and an outlet port for discharging vaporized source material; and
a vaporizer for vaporizing the vaporizable source material, wherein the vaporizer is selected from the group consisting of an electrical energy emitting device, a liquid heating medium and electromagnetic radiation device emitting wavelengths ranging from about 10−
2 to about 10−
8 meters;b) a processing tool positioned downstream from the vaporization vessel; c) a connecting vapor line positioned between the vaporization vessel and processing tool and in fluid communication therewith; and
additionally at least one of the features of;1) a mass flow controller in fluid communication with the connecting vapor line to provide a controlled flow of vaporized source material from the vaporization vessel to the processing tool; 2) a constant flow control valve in fluid communication with the connecting vapor line, wherein the constant flow control valve has an orifice sized to provide a controlled and constant flow of vaporized source material to the processing tool via the connecting vapor line; 3) an adjustable needle valve connected to the outlet port of the vaporization vessel, wherein the opening of the needle valve is continuously adjusted based on the vapor pressure within the vaporization vessel to provide a controlled and constant flow of vaporized source material to the processing tool via the connecting vapor line; 4) a Knudsen cell structure integral to the vaporization vessel or connected to the outlet port of the vaporization vessel, wherein the Knudsen cell has an orifice sized to provide a controlled and constant flow of vaporized source material to processing tool via the connecting vapor line 5) a syringe-type pump system for accurately delivering a controlled amount of a liquid source material into the vaporization vessel for vaporization therein;
or6) a screw delivery device for accurately delivering a solid source material into the vaporization vessel for vaporization therein. - View Dependent Claims (12, 13, 14, 15, 16)
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17. A vapor delivery system for vaporization and delivery of a vaporized source material, the system comprising:
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a) a vaporization vessel for holding a vaporizable source material comprising an input port for introducing a source material;
an outlet port for discharging vaporized source material; and
a vaporizer for vaporizing the vaporizable source material within the vaporized vessel;b) a processing tool positioned downstream from the vaporization vessel; c) a connecting vapor line positioned between the vaporization vessel and processing tool and in fluid communication therewith; d) an input flow controller for introducing a constituent and reproducible flow of a vaporizable source material into the vaporization vessel; and e) an output flow controller for delivering a constant flow rate of the vaporized source material from the vaporization vessel to the processing tool. - View Dependent Claims (18, 19, 20)
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Specification