Method and apparatus for monitoring host to tool communications

• US 7,437,204 B2
• Filed: 11/30/2006
• Issued: 10/14/2008
• Est. Priority Date: 08/23/2000
• Status: Expired due to Term

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Lev-Ami, Uzi, Reich, Yossef Llan
• Primary Examiner(s): Jarrett; Ryan A.
• Assistant Examiner(s): Lee; Douglas S
• Application Number:
  US11/565,209
• Publication Number:
  US 20070094548A1
• Time in Patent Office: 684 Days
• Field of Search: 700/90, 700/96, 700/108, 700/116, 700/121, 700/174, 702/57, 702/117, 709/204, 709217-219
• US Class Current: 700/96
• CPC Class Codes: G05B 19/4186 by protocol, e.g. MAP, TOP
• CPC Class Codes: G05B 2219/31369 Translation, conversion of protocol between two layers, networks
• CPC Class Codes: G05B 2219/32403 Supervisory control, monitor and control system, by operator or automatic
• CPC Class Codes: H04L 43/00 Arrangements for monitoring or testing data switching networks
• CPC Class Codes: H04L 43/06 Generation of reports
• CPC Class Codes: H04L 43/106 using time related information in packets, e.g. by adding timestamps
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

An aspect of the present invention includes a method and device for listening to communications between processes and tools, recording report and report trigger definitions, matching reports from tools with the recorded definitions, and translating messages into a context-insensitive format. Other aspects of the present invention include dynamically enhancing tool status reports, migrating processes form tool control hosts to distributed processors, and screening requests for tool status information from hosts and distributed processors. More detailed descriptions of aspects of the present invention are described in the claims, specification and drawings.

Claims

1. A method of migrating one or more processes from a tool control host in communication with one or more tools to one or more distributed processors, the method including:

providing one or more intercept devices including logic to retain tool status information from one or more tools and to retain pending requests for tool status information from at least one tool control host, said intercept device positioned between and in communication with the tool control host and the tools;

moving one or more processes from the tool control host to one or more distributed processors, said distributed processors in communication with the intercept device;

routing requests for tool status information from the tool control host and the distributed processors to the intercept device; and

satisfying the requests for tool status information using the retained tool status information, the retained pending requests for tool status information, and one or more new requests from the intercept device to the tools for otherwise unavailable tool status information.

2. The method of claim 1, wherein the intercept device monitors one or more events reported by the tools, further including identifying the retained tool status information that is rendered stale by the reported events and expiring the stale tool status information.

3. The method of claim 1, wherein the intercept device monitors one or more events reported by the tools and determines whether collection of tool status information should be modified in response to the reported events.

4. The method of claim 1, wherein the intercept device receives tool status information received from the tools, further including determining appropriate modifications to the tool status information received, and substituting modified tool status information when satisfying the requests for tool status information.

5. The method of claim 1, wherein the tool control host includes comprehensive factory management processes and the distributed processors include limited processes for less than comprehensive factory management processes.

6. The method of claim 1, wherein the tool control host includes legacy programs to control tools and the distributed processors include updated comprehensive factory management process logic.

7. The method of claim 1, wherein the distributed processors include logic to schedule tools.

8. The method of claim 1, wherein the distributed processors include logic to manage yield from tools.

9. The method of claim 1, wherein the distributed processors include logic to manage logistics of moving materials among tools.

10. The method of claim 1, wherein the distributed processors include logic to modify production process steps based on deviations from plan in prior process steps.

11. A method of screened response to requests for tool status information from a variety of sources, the method including:

providing one or more intercept devices including logic to retain tool status information from one or more tools and to retain pending requests for tool status information from at least one tool host, said intercept device positioned between and in communication with the tool host and the tools;

receiving a request for tool status information; and

satisfying the request for tool status information using the retained tool status information, the retained pending requests for tool status information, and one or more new requests from the intercept device to the tool or the external sensors for otherwise unavailable tool status information.

12. The method of claim 11, wherein the tool host includes at least one tool control host and one or more distributed processors.

13. The method of claim 12, wherein the tool control host includes comprehensive factory management processes and the distributed processors include limited processes for less than comprehensive factory management processes.

14. The method of claim 12, wherein the tool control host includes legacy programs to control tools and the distributed processors include updated comprehensive factory management process logic.

15. The method of claim 12, wherein the distributed processors include logic to schedule tools.

16. The method of claim 12, wherein the distributed processors include logic to manage yield from tools.

17. The method of claim 12, wherein the distributed processors include logic to manage logistics of moving materials among tools.

18. The method of claim 12, wherein the distributed processors include logic to modify production process steps based on deviations from plan in prior process steps.

19. The method of claim 11, further including monitoring one or more events reported by the tool and determining which tool status information is stale due to the events.

20. The method of claim 11, further including receiving one or more events reported by the tool and determining whether collection of tool status information should be modified due to the events reported.

21. The method of claim 11, further including determining appropriate modifications to the tool status information received from the tool and substituting modified tool status information when satisfying requests for tool status information.

22. The method of claim 11, further including determining whether the request for tool status information would be satisfied by the tool or by external sensors coupled with the tool.

23. The method of claim 22, further including monitoring one or more events reported by the tool and determining which tool status information is stale due to the events.

24. The method of claim 22, further including receiving one or more events reported by the tool and determining whether collection of tool status information should be modified due to the events reported.

25. The method of claim 22, further including determining appropriate modifications to the tool status information received from the tool and substituting modified tool status information when satisfying requests for tool status information.