Methods and apparatus for data analysis
First Claim
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1. A test system, comprising:
- a storage system configured to store first test data for a first individual component and second test data for a second individual component, wherein the first and second components occupy corresponding locations on different wafers; and
a composite analysis element configured to analyze the first test data and the second test data for common characteristics.
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Abstract
A method and apparatus for testing semiconductors according to various aspects of the present invention comprises a test system comprising composite data analysis element configured to analyze data from more than one dataset. The test system may be configured to provide the data in an output report. The composite data analysis element suitably performs a spatial analysis to identify patterns and irregularities in the composite data set. The composite data analysis element may also operate in conjunction with a various other analysis systems, such as a cluster detection system and an exclusion system, to refine the composite data analysis. The composite may also be merged into other data.
18 Citations
51 Claims
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1. A test system, comprising:
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a storage system configured to store first test data for a first individual component and second test data for a second individual component, wherein the first and second components occupy corresponding locations on different wafers; and a composite analysis element configured to analyze the first test data and the second test data for common characteristics. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A test system, comprising:
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a storage system configured to store test data for at least two sets of components, including test data for individual components, wherein; components from each set of components correspond to components in other sets of components; and the corresponding components occupy corresponding locations on different wafers; and a composite analysis element configured to analyze the test data for at least two individual corresponding components for common characteristics. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34)
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35. A method for testing semiconductors, comprising:
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obtaining at least two datasets of test data for at least two sets of components, wherein; a first component in a first set corresponds to a second component in a second set; and the first and second components occupy corresponding locations on different wafers; and analyzing the test data for the individual corresponding first and second components for common characteristics. - View Dependent Claims (36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51)
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Specification