System and method for improving equipment communication in semiconductor manufacturing equipment

• US 7,437,404 B2
• Filed: 05/20/2004
• Issued: 10/14/2008
• Est. Priority Date: 05/20/2004
• Status: Expired due to Fees

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Shen, Hsueh Chi
• Primary Examiner(s): Najjar; Saleh
• Assistant Examiner(s): Ashraf; Waseem
• Application Number:
  US10/851,592
• Publication Number:
  US 20050261796A1
• Time in Patent Office: 1,608 Days
• Field of Search: 709/234, 709/216, 709/202, 709/203, 709/204, 709/226, 709/229, 370411-419, 700/121, 700/119, 700/117, 718/1, 718/100
• US Class Current: 709/202
• CPC Class Codes: G05B 2219/33209 Protocol, mailbox, email, mail system
• CPC Class Codes: H04L 41/0213 Standardised network management protocols, e.g. simple network management protocol [SNMP]
• CPC Class Codes: H04L 41/024 using relational databases for representation of network management data, e.g. managing via structured query language [SQL]
• CPC Class Codes: H04L 41/046 comprising network management agents or mobile agents therefor
• CPC Class Codes: H04L 43/00 Arrangements for monitoring or testing data switching networks
• CPC Class Codes: H04L 45/00 Routing or path finding of packets in data switching networks routing or path finding in wireless networks H04W40/00

Abstract

Provided is a system and method for connecting semiconductor manufacturing equipment to a host and one or more clients. In one example, the system includes an application queue, a host queue, and an equipment queue configured to hold messages received from and sent to an application agent, a host agent, and an equipment agent, respectively. A management information base may be configured to store information identifying a first virtual channel linking the client with the manufacturing equipment via the application queue and the equipment queue, and a second virtual channel linking the host with the manufacturing equipment via the host queue and the equipment queue. A dispatcher may be configured to use information from the management information base to route messages between the client and the manufacturing equipment via the first virtual channel and to route messages between the host and the manufacturing equipment via the second virtual channel.

Claims

1. A system for connecting semiconductor manufacturing equipment to a host and at least a first client via virtual channels, the system comprising:

a first application agent, a host agent, and an equipment agent configured to communicate with the first client, the host, and the manufacturing equipment, respectively;

a first application queue, a host queue, and an equipment queue configured to hold messages received from and sent to the first application agent, the host agent, and the equipment agent, respectively;

a management information base configured to store information identifying a first virtual channel linking the first client with the manufacturing equipment via the first application queue and the equipment queue, and a second virtual channel linking the host with the manufacturing equipment via the host queue and the equipment queue; and

a dispatcher configured to use the information from the management information base to route messages between the first client and the manufacturing equipment via the first virtual channel and to route messages between the host and the manufacturing equipment via the second virtual channel.

2. The system of claim 1 further comprising a protocol agent positioned between the management information base and a network, wherein the system may be monitored as a network device using a network agent.

3. The system of claim 1 further comprising a second application agent and a second application queue, wherein the management information base is further configured to store information identifying a third virtual channel linking a second client with the manufacturing equipment via the second application queue and the equipment queue.

4. The system of claim 3 wherein the first and second application agents communicate using different protocols.

5. The system of claim 1 wherein the first application queue further comprises an inbound portion and an outbound portion, wherein messages destined for the first application agent via the first virtual channel are stored in the inbound portion, and wherein messages sent by the first application agent via the first virtual channel are stored in the outbound portion.

6. The system of claim 5 wherein the host queue further comprises an inbound portion and an outbound portion, wherein messages destined for the host agent via the second virtual channel are stored in the inbound portion, and wherein messages sent by the host agent via the second virtual channel are stored in the outbound portion.

7. The system of claim 6 wherein the equipment queue further comprises an inbound portion and an outbound portion, wherein messages destined for the equipment agent via the first and second virtual channels are stored in the inbound portion, and wherein messages sent by the equipment agent via the first and second virtual channels are stored in the outbound portion.

8. The system of claim 1 further comprising at least one memory for storing instructions for at least one of the application agent, the host agent, the equipment agent, and the dispatcher.

9. The system of claim 1 further comprising:

at least one processor for executing software instructions;

at least one computer readable medium for storing the instructions, the instructions including instructions for assigning a higher priority to messages transferred via the second virtual channel than to messages transferred via the first virtual channel, wherein the higher priority causes the messages in the second virtual channel to be handled by the dispatcher before the messages in the first virtual channel.

10. The system of claim 9 further comprising instructions for registering the first client for an event, wherein the first client will be notified when the event occurs.

11. A computer readable medium having stored thereon a sequence of instructions which, when executed by a computer, causes the computer to perform a method for simultaneously connecting semiconductor manufacturing equipment having a single communication port to a plurality of clients, the method comprising:

receiving a first message, by a communication agent, from one of the plurality of clients;

enqueuing, by a first agent, the first message in a communication queue associated with the communication agent;

identifying the first message as a next message to transfer by a dispatcher;

dequeuing, by the dispatcher, the first message from the communication queue and enqueueing the first message in an equipment queue associated with the manufacturing equipment; and

dequeueing the first message, by an equipment agent, from the equipment queue and sending the first message to the manufacturing equipment.

12. The method of claim 11 further comprising:

receiving a second message, by the equipment agent, from the manufacturing equipment;

enqueuing, by the equipment agent, the second message in the equipment queue;

identifying a destination for the message by the dispatcher, wherein the destination is one of the plurality of clients;

dequeuing, by the dispatcher, the second message from the equipment queue and enqueueing the second message in a communication queue corresponding to the destination client;

dequeueing the second message, by a second agent, from the equipment queue and sending the second message to the manufacturing equipment.

13. The method of claim 12 further comprising identifying, by the dispatcher, a priority of each of the first and second messages.

14. The method of claim 12 further comprising accessing a management information base, by the dispatcher, to identify the destination client.

15. The method of claim 11 further comprising:

receiving a connection request from one of the plurality of clients; and

establishing a virtual channel between the client and the manufacturing equipment in response to the connection request.

16. The method of claim 15 wherein establishing the virtual channel includes:

identifying a communication agent having a communication protocol compatible with the client;

storing information linking the communication agent with the client; and

sending a response message to the client, wherein the response message instructs the client to communicate with the manufacturing equipment via a port associated with the communication agent.

17. The method of claim 11 further comprising sending and receiving network monitoring messages to verify that the client and the manufacturing equipment are able to communicate.

18. The method of claim 11 further comprising:

receiving a request for subscribing to an event from one of the plurality of clients; and

notifying the client when the event occurs.