Apparatus and method of forming silicide in a localized manner

• US 7,439,168 B2
• Filed: 10/12/2004
• Issued: 10/21/2008
• Est. Priority Date: 10/12/2004
• Status: Expired due to Fees

• Current Assignee: DCG Systems Incorporated (Thermo Fisher Scientific Incorporated)
• Original Assignee: DCG Systems Incorporated (Thermo Fisher Scientific Incorporated)
• Inventors: Lundquist, Theodore R., Tsao, Chun-Cheng, Sadewater, Peter, Kerst, Uwe Jürgen, Schoemann, Stephan, Boit, Christian
• Primary Examiner(s): Smith; Zandra
• Assistant Examiner(s): Perkins; Pamela E
• Application Number:
  US10/964,157
• Publication Number:
  US 20060079086A1
• Time in Patent Office: 1,470 Days
• Field of Search: None
• US Class Current: 438/598
• CPC Class Codes: H01J 2237/2482 Optical means
• CPC Class Codes: H01J 2237/31749 Focused ion beam
• CPC Class Codes: H01J 37/228 whereby illumination and light collection take place in the same area of the discharge
• CPC Class Codes: H01J 37/3056 for microworking, e.g. etching of gratings, trimming of electrical components trimming of resistors H01C17/22
• CPC Class Codes: H01L 21/76892 modifying the pattern
• CPC Class Codes: H01L 21/76898 formed through a semiconductor substrate

Abstract

Localized trenches or access holes are milled in a semiconductor substrate to define access points to structures of an integrated circuit intended for circuit editing. A conductor is deposited, such as with a focused ion beam tool, in the access holes and a localized heat is applied to the conductor for silicide formation, especially at the boundary between a semiconductor structure, such as diffusion regions, and the deposited conductor. Localized heat may be generated at the target location through precise laser application, current generation through the target location, or a combination thereof.

Claims

1. A method of editing an integrated circuit having a semiconductor substrate and having at least one semiconductor structure formed therein, the method comprising:

Removing some portion of the semiconductor substrate;

Depositing a conductive material in electrical communication with the at least one semiconductor structure; and

Applying localized heat to form a substantially ohmic contact between the conductive material and the at least one semiconductor structure to thereby edit connections of electrical circuitry of the integrated circuit,

wherein the operation of applying localized heat comprises;

applying laser-based radiation to the conductive material to form the substantially ohmic contact with the at least one semiconductor structure.

2. The method of claim 1 wherein the conductive material is selected from the group comprising tungsten, platinum, cobalt, aluminum, copper, silver, and gold.

3. The method of claim 1 wherein the operation of removing some portion of the semiconductor substrate comprises focused ion beam milling of at least one trench in a region adjacent the at least one semiconductor structure.

4. The method of claim 3 further comprising focused ion beam milling at least one node access hole to the at least one semiconductor structure.

5. The method of claim 4 further comprising depositing the conductive material over the insulator.

6. The method of claim 3 further comprising depositing an insulator in the at least one trench and the at least one node access hole.

7. The method of claim 1 further comprising the operation of depositing the conductive material in further contact with at least one metallization layer of the integrated circuit.

8. The method of claim 1 wherein the operation of applying localized heat comprises a step for localized heating to form silicides in an interface between a deposited conductor and a semiconductor structure.

9. A method of editing an integrated circuit having a semiconductor substrate and having at least one semiconductor structure formed therein, the method comprising:

removing some portion of the semiconductor substrate;

depositing a conductive material in electrical communication with the at least one semiconductor structure; and

applying localized heat to form a substantially ohmic contact between the conductive material and the at least one semiconductor structure to thereby edit connections of electrical circuitry of the integrated circuit,

wherein the operation of applying localized heat comprises;

applying laser-based radiation to the semiconductor, prior to conductive material deposition, to form the substantially ohmic contact with the at least one semiconductor structure.

10. A method of editing an integrated circuit having a semiconductor substrate and having at least one semiconductor structure formed therein, the method comprising:

removing some portion of the semiconductor substrate;

depositing a conductive material in electrical communication with the at least one semiconductor structure; and

applying localized heat to form a substantially ohmic contact between the conductive material and the at least one semiconductor structure to thereby edit connections of electrical circuitry of the integrated circuit,

wherein the operation of applying localized heat comprises;

arranging at least one current delivering probe in electrical communication with the conductive material; and

applying a current to the conductive material to generate joule heating and form the substantially ohmic contact with the at least one semiconductor structure.

11. A method of editing an integrated circuit having a semiconductor substrate and having at least one semiconductor structure formed therein, the method comprising:

removing some portion of the semiconductor substrate;

depositing a conductive material in electrical communication with the at least one semiconductor structure; and

applying localized heat to form a substantially ohmic contact between the conductive material and the at least one semiconductor structure to thereby edit connections of electrical circuitry of the integrated circuit,

wherein the operation of applying localized heat comprises;

applying laser-based radiation to the conductive material; and

applying a current to the conductive material.

12. A method of editing an integrated circuit having a semiconductor substrate and having at least one semiconductor structure formed therein, the method comprising:

removing some portion of the semiconductor substrate;

depositing a conductive material in electrical communication with the at least one semiconductor structure; and

applying localized heat to form a substantially ohmic contact between the conductive material and the at least one semiconductor structure to thereby edit connections of electrical circuitry of the integrated circuit,

wherein the at least one semiconductor structure is selected from the group comprising a transistor and a diode.