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Method and an apparatus for shape measurement, and a frequency comb light generator

  • US 7,440,112 B2
  • Filed: 08/17/2005
  • Issued: 10/21/2008
  • Est. Priority Date: 08/18/2004
  • Status: Expired due to Fees
First Claim
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1. A method for shape measurement comprising the steps of:

  • generating a frequency COMB light by inputting a laser light from a laser light source into an optical fiber which compensates a change in the polarization condition and maintains the polarization, and has a first mirror and a second mirror which are positioned with a resonant distance in between and modulating the laser light transmitting between the first mirror and the second mirror using a modulation electrode; and

    measuring a shape of an measured object using an optical interferometer by inputting the frequency COMB light into the optical interferometer for distance measurement, wherein further comprising the step of;

    regulating an observation depth by varying the modulation signal applied to the modulation electrode so that a frequency pitch of frequency COMBs which constitutes the frequency COMB light is varied.

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