Optical measuring system

• US 7,442,909 B2
• Filed: 12/09/2004
• Issued: 10/28/2008
• Est. Priority Date: 12/12/2003
• Status: Expired due to Fees

• Current Assignee: Thomas Swan & Company Limited (Aixtron AG)
• Original Assignee: Thomas Swan & Company Limited (Aixtron AG)
• Inventors: Holmes, Melanie
• Primary Examiner(s): Lee; John R
• Application Number:
  US10/582,254
• Publication Number:
  US 20070052694A1
• Time in Patent Office: 1,419 Days
• Field of Search: 250/201.9, 250/237.R, 356/121, 359/11
• US Class Current: 250/201.9
• CPC Class Codes: G01J 9/00 Measuring optical phase difference devices or arrangements for controlling the phase of light beams G02F1/01; Determining degree of coherence; Measuring optical wavelength spectrometry G01J3/00
• CPC Class Codes: G02B 26/06 for controlling the phase of light G02B26/08 takes precedence , measuring optical phase difference G01J9/00
• CPC Class Codes: G02B 27/46 Systems using spatial filters

Abstract

Apparatus and methods are described for of measuring amplitude and phase variations in a spatially coherent beam of light. A beam of coherent light is made incident upon a spatial array of phase modulating elements displaying a pixellated first phase distribution. In a measuring region of said spatial array, the phase distribution is changed to a new value while retaining the first phase distribution outside the measuring region, for example by flashing a single pixel. The change in intensity resulting from the change in phase distribution is then determined.

Claims

1. A method of measuring amplitude and phase variations in a spatially coherent beam of light comprising

causing the beam to be incident upon a spatial array displaying a pixellated first phase distribution,

in a measuring region of said spatial array, causing the phase distribution to change to a new value while retaining the first phase distribution outside the measuring region,

in the Fourier plane, determining the change in intensity resulting from the change in phase distribution.

4. A method as claimed in claim 1, comprising measuring the intensity in a region of the Fourier plane where the amplitude distribution associated with the beam modulated by the original hologram is relatively stronger, but the amplitude distribution at the Fourier plane of the field component created by the perturbation in the hologram is relatively stronger, varying the position on the SLM where the perturbation is applied.

5. A method as claimed in claim 4, further comprising taking the square root of a set of values obtained.

6. A method as claimed in claim 1, comprising stepping through a sequence of phase distributions.

7. A method as claimed in claim 1, comprising varying the phase shift in a respective single pixel.

10. A method as claimed in claim 1 wherein the step of detecting is carried out at a single point.

11. A method as claimed in claim 1 wherein after changing to a new value, the phase distribution in the measuring region returns to its original value.

2. A method of characterising a spatially coherent beam of light, comprising

disposing a LCOS SLM in the path of the beam;

causing the LCOS SLM to display a first hologram pattern;

at a location in said beam where the amplitude and phase of the beam are to be characterised, changing the hologram pattern to a second hologram pattern; and

measuring the effect of said change by determining an intensity change.

3. A method as claimed in claim 2, wherein, the output from the SLM is detected in the Fourier plane to detect the Fourier output.

8. A method as claimed in claim 3 comprising manipulating hologram patterns to obtain information related to a coherent coupling term to thereby derive amplitude information.

9. A method as claimed in claim 3 comprising manipulating hologram patterns to obtain information related to a coherent coupling term to thereby derive phase information.

12. Apparatus for measuring amplitude and phase variations in a spatially coherent beam of light, the apparatus comprising a pixellated spatial array, each pixel being controllable to apply any of plural phase shifts to input light, whereby the array displays a desired distribution of phase modulation,

means for causing the array to display a first selected distribution of phase modulation;

means for changing the first distribution in a measuring region of said spatial array to assume a new distribution while retaining the first phase distribution outside the measuring region,

means disposed in the Fourier plane for determining a change in intensity of light resulting from the change in phase distribution.

13. Apparatus as claimed in claim 12, wherein the spatial array has only two possible values of phase shift per pixel.

14. Apparatus as claimed in claim 12, wherein the spatial array has more than two possible values of phase shift per pixel.

15. Apparatus for characterising a spatially coherent beam of light, comprising

a LCOS SLM arranged so that a said beam of light can be incident upon it;

means for causing the LCOS SLM to display a first hologram pattern;

means for changing the hologram pattern to a second hologram pattern at a location in said beam where the amplitude and phase of the beam are to be characterised; and

means for measuring an intensity of light to determine the effect of said change of hologram pattern.

16. Apparatus as claimed in claim 15, wherein the means for measuring is disposed in the Fourier plane to detect the Fourier output.

17. Apparatus as claimed in claim 15, further comprising a lens for providing the Fourier output.

18. Apparatus as claimed in claim 15, further comprising a mirror for providing the Fourier output.