Apparatus and method for testing defects
First Claim
1. A defect inspection apparatus comprising:
- an illumination optical unit for obliquely illuminating an object with a slit-like shaped laser, the slit-like shaped laser being converged in one direction and collimated in a direction transverse to the one direction;
a first detection optical unit including a first image sensor for detecting a first image formed by light reflected from the object by the illumination of the slit-like shaped laser and reflected in a first direction substantially normal to a surface of the object;
a second detection optical unit including a second image sensor for detecting a second image formed by light reflected from the object by the illumination of the slit-like shaped laser and reflected in a second direction inclined to the normal direction to the surface of the object;
an image signal processing unit which processes both of a signal outputted from the first detection optical unit by the detection of the first image and a signal outputted from the second detection optical unit by the detection of the second image; and
an output unit which outputs information processed by the image signal processing unit;
wherein the first detection optical unit includes a spatial filter which cuts off light reflected from patterns formed on the object; and
wherein the second detection optical unit includes a variable spatial filter which cuts off light reflected from patterns formed on the object.
0 Assignments
0 Petitions
Accused Products
Abstract
A defect inspection apparatus includes an illumination optical unit for obliquely illuminating an object with a slit-like shaped laser, a first detection optical unit for detecting a first image formed by light reflected from the object by the illumination of the slit-like shaped laser and reflected in a first direction substantially normal to a surface of the object, a second detection optical unit for detecting a second image formed by light reflected from the object by the illumination of the slit-like shaped laser and reflected in a second direction inclined to the normal direction to the surface of the object, an image signal processing unit which processes a signal outputted from the first detection optical unit and a signal outputted from the second detection optical unit, and an output unit which outputs information processed by the image signal processing unit.
-
Citations
15 Claims
-
1. A defect inspection apparatus comprising:
-
an illumination optical unit for obliquely illuminating an object with a slit-like shaped laser, the slit-like shaped laser being converged in one direction and collimated in a direction transverse to the one direction; a first detection optical unit including a first image sensor for detecting a first image formed by light reflected from the object by the illumination of the slit-like shaped laser and reflected in a first direction substantially normal to a surface of the object; a second detection optical unit including a second image sensor for detecting a second image formed by light reflected from the object by the illumination of the slit-like shaped laser and reflected in a second direction inclined to the normal direction to the surface of the object; an image signal processing unit which processes both of a signal outputted from the first detection optical unit by the detection of the first image and a signal outputted from the second detection optical unit by the detection of the second image; and an output unit which outputs information processed by the image signal processing unit; wherein the first detection optical unit includes a spatial filter which cuts off light reflected from patterns formed on the object; and wherein the second detection optical unit includes a variable spatial filter which cuts off light reflected from patterns formed on the object. - View Dependent Claims (2, 3, 4, 5, 6, 7)
-
-
8. A defect inspecting apparatus comprising:
-
an illumination optical unit which obliquely projects a slit-like shaped laser focused onto a line on a surface of an object, the slit-like shaped laser being converged in one direction and collimated in a direction transverse to the one direction; a first detection optical unit including a first image sensor for detecting a first image formed by light reflected from the object by the illumination of the laser and reflected in a first direction to a surface of the object; a second detection optical unit including a second image sensor for detecting a second image formed by light reflected from the object by the illumination of the laser and reflected in a second direction inclined to the first direction to the surface of the object; an image signal processing unit which processes both of a signal outputted from the first detection optical unit by the detection of the first image and a signal outputted from the second detection optical unit by the detection of the second image; and an output unit which outputs information processed by the image signal processing unit; wherein the first detection optical unit includes a spatial filter which cuts off light from patterns formed on the object; and wherein the second detecting optical unit includes a variable spatial filter which cuts off light reflected from patterns formed on the object. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15)
-
Specification