Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays
First Claim
1. A micro-electro-mechanical-system (MEMS) mirror device, comprising:
- a mirror having a 2-dimensional rotational T-shaped hinge at a first end;
a support structure connected to the mirror through the 2-dimensional rotational T-shaped hinge;
whereby the mirror is rotatable about a first axis of rotation and a second torsional axis of rotation perpendicular to the first axis of rotation; and
wherein the 2-dimensional rotational T-shaped hinge comprises;
a first torsional spring having a first mounting point at a first end connected to the support structure and having a second end;
a second torsional spring having a second mounting point at a first end connected to the support structure and having a second end, the second end of the first torsional spring being connected to the second end of the second torsional spring;
a third torsional spring having a first end connected to the second ends of the first and second torsional springs and having a second end connected to the first end of the mirror;
whereby the first torsional spring and the second torsional spring define the first axis of rotation between the first and second mounting points, and the third torsional spring defines the second torsional axis of rotation perpendicular to the first axis of rotation.
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Abstract
The invention provides a micro-electro-mechanical-system (MEMS) mirror device, comprising: a mirror having a 2-dimensional rotational T-shaped hinge at a first end, and having a flexible connection at a second end opposite the first end. The invention also provides a MEMS mirror device, comprising: a mirror having a 2-dimensional rotational T-shaped hinge at a first end; and a vertical actuator connected to the 2-dimensional T-shaped hinge through a rigid connection. The invention also provides a MEMS mirror device, comprising: a mirror connected to a first end of a rotational actuator through bending springs at a first end, and having a torsional spring at a second end opposite the first end; a movable cantilever connected to the mirror through the torsional spring; and a support structure connected to the first end and a second end of the rotational actuator through torsional springs and connected to the movable cantilever.
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Citations
50 Claims
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1. A micro-electro-mechanical-system (MEMS) mirror device, comprising:
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a mirror having a 2-dimensional rotational T-shaped hinge at a first end; a support structure connected to the mirror through the 2-dimensional rotational T-shaped hinge; whereby the mirror is rotatable about a first axis of rotation and a second torsional axis of rotation perpendicular to the first axis of rotation; and wherein the 2-dimensional rotational T-shaped hinge comprises; a first torsional spring having a first mounting point at a first end connected to the support structure and having a second end; a second torsional spring having a second mounting point at a first end connected to the support structure and having a second end, the second end of the first torsional spring being connected to the second end of the second torsional spring; a third torsional spring having a first end connected to the second ends of the first and second torsional springs and having a second end connected to the first end of the mirror; whereby the first torsional spring and the second torsional spring define the first axis of rotation between the first and second mounting points, and the third torsional spring defines the second torsional axis of rotation perpendicular to the first axis of rotation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50)
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Specification