High density trench FET with integrated Schottky diode and method of manufacture
First Claim
1. A structure comprising:
- a monolithically integrated trench FET and Schottky diode, the monolithically integrated trench FET and Schottky diode comprising;
a pair of trenches terminating in a first silicon region of first conductivity type;
two body regions of a second conductivity type between the pair of trenches, the two body regions being separated by a second silicon region of the first conductivity type;
a source region of the first conductivity type over each body region;
a contact opening extending between the pair of trenches to a depth below the source regions; and
an interconnect layer filling the contact opening so as to electrically contact the source regions and the second silicon region, the interconnect layer forming a Schottky contact with the second silicon region.
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Accused Products
Abstract
A monolithically integrated trench FET and Schottky diode includes a pair of trenches terminating in a first silicon region of first conductivity type. Two body regions of a second conductivity type separated by a second silicon region of the first conductivity type are located between the pair of trenches. A source region of the first conductivity type is located over each body region. A contact opening extends between the pair of trenches to a depth below the source regions. An interconnect layer fills the contact opening so as to electrically contact the source regions and the second silicon region. Where the interconnect layer electrically contacts the second silicon region, a Schottky contact is formed.
347 Citations
28 Claims
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1. A structure comprising:
a monolithically integrated trench FET and Schottky diode, the monolithically integrated trench FET and Schottky diode comprising; a pair of trenches terminating in a first silicon region of first conductivity type; two body regions of a second conductivity type between the pair of trenches, the two body regions being separated by a second silicon region of the first conductivity type; a source region of the first conductivity type over each body region; a contact opening extending between the pair of trenches to a depth below the source regions; and an interconnect layer filling the contact opening so as to electrically contact the source regions and the second silicon region, the interconnect layer forming a Schottky contact with the second silicon region. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A structure comprising a monolithically integrated trench MOSFET and Schottky diode, the monolithically integrated trench MOSFET and Schottky diode comprising:
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a first epitaxial layer of a first conductivity type; a second epitaxial layer of the first conductivity type over the first epitaxial layer, the first epitaxial layer having a higher doping concentration than the second epitaxial layer; a plurality of trenches extending through the second epitaxial layer and terminating in the first epitaxial layer; two body regions of a second conductivity type between every two adjacent trenches, the two body regions being separated by a portion of the second epitaxial layer; a source region of the first conductivity type over each body region; a contact opening extending between every two adjacent trenches to a depth below the source regions; and a Schottky barrier metal layer filling the contact openings so as to electrically contact the source region and the portion of the second epitaxial layer, the Schottky barrier metal layer forming a Schottky contact with the portion of the second epitaxial layer. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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Specification