System and method of providing a regenerating protective coating in a MEMS device
First Claim
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1. An interferometric light modulating device, comprising:
- a transparent substrate;
an interferometric modulator array disposed on said transparent substrate, wherein said array comprises a transmissive layer and a reflective layer;
a protective coating disposed between at least a portion of said transmissive layer and said reflective layer; and
a heater configured to increase the temperature of said protective coating.
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Abstract
In various embodiments of the invention, a regenerating protective coating is formed on at least one surface of an interior cavity of a MEMS device. Particular embodiments provide a regenerating protective coating on one or more mirror surfaces of an interferometric light modulation device, also known as an iMoD in some embodiments. The protective coating can be regenerated through the addition of heat or energy to the protective coating.
176 Citations
31 Claims
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1. An interferometric light modulating device, comprising:
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a transparent substrate; an interferometric modulator array disposed on said transparent substrate, wherein said array comprises a transmissive layer and a reflective layer; a protective coating disposed between at least a portion of said transmissive layer and said reflective layer; and a heater configured to increase the temperature of said protective coating. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
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27. A system for regenerating a self-aligned monolayer formed on one or more layers of a micro-electronic-mechanical-system (MEMS) device, comprising:
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a MEMS device comprising a transmissive layer, a reflective layer, and a self-aligned monolayer; and a heater positioned proximal to the MEMS device, wherein the heat emitted from said heater is sufficient to elevate the temperature of a self-aligned monolayer.
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28. A method of regenerating a monolayer in a MEMS device, comprising:
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providing a MEMS device comprising an interferometric modulator and a heater, wherein said interferometric modulator comprises a monolayer; and activating said heater in order to increase the temperature of said monolayer, whereby said monolayer is regenerated.
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29. A system for regenerating a protective coating on an interferometric modulator device, comprising:
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an interferometric modulator device comprising a means for selectively allowing certain wavelengths of light to pass through a first layer, a means for selectively reflecting certain wavelengths of light, and a protective coating; and a means for heating the protective coating.
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30. An interferometric modulator device with a protective coating, wherein said protective coating was regenerated on either a transmissive layer or a reflective layer of the interferometric modulator device at least once.
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31. A method of making a system for regenerating a self-aligned monolayer formed on one or more layers of a micro-electronic-mechanical-system (MEMS) device, comprising:
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providing a MEMS device comprising a transmissive layer, a reflective layer, and a self-aligned monolayer; and positioning a heater proximal to the MEMS device, wherein the heater is positioned so that heat emitted from said heater is sufficient to elevate the temperature of a self-aligned monolayer.
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Specification