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Method and structure for fabricating mechanical mirror structures using backside alignment techniques

  • US 7,449,284 B2
  • Filed: 05/11/2004
  • Issued: 11/11/2008
  • Est. Priority Date: 05/11/2004
  • Status: Expired due to Fees
First Claim
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1. A method for fabricating mechanical deflection structures from bonding substrates, the method comprising:

  • providing a bonded substrate structure, the bonded substrate structure comprising a first substrate having a first thickness and a first face, the bonded substrate structure comprising a second substrate having a second thickness and a second face, wherein the first face is bonded to the second face, at least the first substrate or at least the second substrate having a buried alignment mark on either the first face or the second face;

    applying a layer of photomasking material overlying a backside surface of the first substrate;

    illuminating electromagnetic radiation through the layer of photomasking material and through a portion of the first thickness, thereby scattering the electromagnetic radiation off of the buried alignment mark;

    detecting an indication of the buried alignment mark using a signal associated with a portion of the electromagnetic radiation, wherein the signal traverses through the portion of the first thickness and through the layer of photomasking material;

    aligning a pattern on a reticle to the layer of photomasking to an accuracy of 200 nanometers and less with respect to the buried alignment mark based on the detected indication; and

    exposing a portion of the layer of photomasking material once the pattern has been aligned using the buried alignment mark to form a second alignment mark on the backside surface of the first substrate.

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