Method and structure for fabricating mechanical mirror structures using backside alignment techniques

• US 7,449,284 B2
• Filed: 05/11/2004
• Issued: 11/11/2008
• Est. Priority Date: 05/11/2004
• Status: Expired due to Fees

• Current Assignee: Miradia Inc. (Walsin Lihwa Corporation)
• Original Assignee: Miradia Inc. (Walsin Lihwa Corporation)
• Inventors: Yang, Xiao Charles
• Primary Examiner(s): Huff; Mark F.
• Assistant Examiner(s): Sullivan; Caleen O
• Application Number:
  US10/843,909
• Publication Number:
  US 20050255412A1
• Time in Patent Office: 1,645 Days
• Field of Search: 430/22, 430/322, 430/5, 430/396, 430/30, 430/395, 430/311, 257/797
• US Class Current: 430/322
• CPC Class Codes: B81C 1/00484 Processes for releasing structures not provided for in group B81C1/00476
• CPC Class Codes: B81C 2203/036 Fusion bonding
• CPC Class Codes: B81C 2203/051 Active alignment, e.g. using internal or external actuators, magnets, sensors, marks or marks detectors

Abstract

A method for fabricating mechanical structures from bonding substrates. The method includes providing a bonded substrate structure, which includes a first substrate having a first thickness of silicon material and a first face. The bonded substrate also includes a second substrate having a second thickness and a second face. At least the first substrate or at least the second substrate (or both) has an alignment mark comprising a front-size zero mark within a portion of either the first thickness or the second thickness. The method includes applying a layer of photomasking material overlying a first backside surface of the first substrate. The method includes illuminating electromagnetic radiation using a coherent light source through the layer of photoresist material and through a portion of the first thickness. The method includes detecting an indication of the alignment mark using a signal associated with a portion of the electromagnetic radiation from a second backside of the second substrate. The method also includes exposing a portion of the layer of photomasking material once a pattern a portion of a reticle structure has been aligned using the alignment mark.

Claims

1. A method for fabricating mechanical deflection structures from bonding substrates, the method comprising:

providing a bonded substrate structure, the bonded substrate structure comprising a first substrate having a first thickness and a first face, the bonded substrate structure comprising a second substrate having a second thickness and a second face, wherein the first face is bonded to the second face, at least the first substrate or at least the second substrate having a buried alignment mark on either the first face or the second face;

applying a layer of photomasking material overlying a backside surface of the first substrate;

illuminating electromagnetic radiation through the layer of photomasking material and through a portion of the first thickness, thereby scattering the electromagnetic radiation off of the buried alignment mark;

detecting an indication of the buried alignment mark using a signal associated with a portion of the electromagnetic radiation, wherein the signal traverses through the portion of the first thickness and through the layer of photomasking material;

aligning a pattern on a reticle to the layer of photomasking to an accuracy of 200 nanometers and less with respect to the buried alignment mark based on the detected indication; and

exposing a portion of the layer of photomasking material once the pattern has been aligned using the buried alignment mark to form a second alignment mark on the backside surface of the first substrate.

2. The method of claim 1 wherein the portion of the first thickness is about two microns and less of silicon bearing material.

3. The method of claim 1 wherein the portion of the first thickness is no greater than 0.5 micron of silicon bearing material.

4. The method of claim 1 wherein the buried alignment mark comprises an etched structure.

5. The method of claim 1 wherein the electromagnetic radiation comprises IR.

6. The method of claim 1 wherein the electromagnetic radiation comprises visible light and the indication comprises a pattern.

7. The method of claim 1 wherein the indication is a standard ASML alignment mark.

8. The method of claim 1 wherein the first thickness has been thinned using a polishing process.

9. The method of claim 1 wherein the backside surface is a mirror surface.

10. The method of claim 1 wherein the detecting comprises capturing the signal using an array of charged coupled devices or other detection devices.

11. The method of claim 1 further comprising releasing one or more mirror structures from the exposed portion of the backside of the first substrate.

12. method of claim 1 wherein the buried alignment mark comprises a depth of about 1200 Angstroms.

13. The method of claim 1 wherein the illumination is a laser source having a wave length of about 300 nanometers to about 200 nanometers.

14. The method of claim 1 wherein the indication is a diffraction pattern.

15. A method for fabricating mechanical structures from bonding substrates, the method comprising:

providing a bonded substrate structure, the bonded substrate structure comprising a first substrate having a first thickness of silicon material and a first face, the bonded substrate structure comprising a second substrate having a second thickness and a second face, at least the first substrate or at least the second substrate having a buried alignment mark comprising a front-side zero mark on either the first face or the second face;

applying a layer of photomasking material overlying a first backside surface of the first substrate;

illuminating electromagnetic radiation using a coherent light source through the layer of photomasking material and through a portion of the first thickness;

detecting an indication of the buried alignment mark using a signal associated with a portion of the electromagnetic radiation from a second backside of the second substrate; and

exposing a portion of the layer of photomasking material once a pattern of a reticle structure has been aligned using the detected indication of the buried alignment mark to form a second alignment mark on the first backside surface of the first substrate.

16. The method of claim 15 wherein the buried alignment mark comprises an etched structure.

17. The method of claim 15 wherein the electromagnetic radiation comprises IR.

18. The method of claim 15 wherein the electromagnetic radiation comprises visible light.

19. The method of claim 15 wherein the first thickness is no greater than 10 microns.

20. The method of claim 15 wherein the first thickness has been thinned using a polishing process.

21. The method of claim 15 wherein the backside surface is a mirror surface.

22. The method of claim 15 wherein the detecting comprises capturing the signal using an array of charged coupled devices or other detection devices.

23. The method of claim 15 further comprising releasing one or more mirror structures from the exposed portion of the backside of the first substrate.

24. The method of claim 15 wherein the buried alignment mark comprises a depth of about 1200 Angstroms.

25. The method of claim 15 wherein the illumination is a laser source having a wave length of about 300 nanometers to about 200 nanometers.