MEMS sensor driving device, MEMS sensor driving method, and active sensor using MEMS
First Claim
1. A microelectromechanical system sensor driving device for driving a microelectromechanical system sensor including an oscillator the microelectromechanical system sensor driving device comprising:
- a detecting unit for detecting an oscillation of the oscillator; and
a feedback unit for amplifying a signal representing the oscillation detected by the detecting unit and inputting the amplified signal as a driving signal to the microelectromechanical system sensor,wherein,the microelectromechanical system sensor includes a supporter provided on a surface of a substrate, an elastic member having one end connected to the supporter, such that the oscillator is supported by another end of the elastic member in a suspended state over the surface of the substrate and displaceable relatively to the substrate, and a driving electrode connected to the supporter via the elastic member for electromagnetically driving the oscillator.
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Abstract
A MEMS sensor driving device drives a MEMS sensor including a supporter provided on a surface of a substrate, an elastic member having one end connected to the supporter, and an oscillator which is supported by another end of the elastic member in a suspended state over the surface of the substrate and which is displaceable for the substrate. The MEMS sensor driving device includes a detecting unit for detecting an oscillation of the oscillator, and a feedback unit for amplifying a signal representing the oscillation detected by the detecting unit and inputting the amplified signal as a driving signal to the MEMS sensor.
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Citations
8 Claims
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1. A microelectromechanical system sensor driving device for driving a microelectromechanical system sensor including an oscillator the microelectromechanical system sensor driving device comprising:
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a detecting unit for detecting an oscillation of the oscillator; and a feedback unit for amplifying a signal representing the oscillation detected by the detecting unit and inputting the amplified signal as a driving signal to the microelectromechanical system sensor, wherein, the microelectromechanical system sensor includes a supporter provided on a surface of a substrate, an elastic member having one end connected to the supporter, such that the oscillator is supported by another end of the elastic member in a suspended state over the surface of the substrate and displaceable relatively to the substrate, and a driving electrode connected to the supporter via the elastic member for electromagnetically driving the oscillator. - View Dependent Claims (2, 3, 4)
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5. A microelectromechanical system sensor driving method for driving a microelectromechanical system sensor including an oscillator, the microelectromechanical system sensor driving method comprising the steps of:
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detecting an oscillation of the oscillator; and amplifying a signal representing the detected oscillation and inputting the amplified signal as a driving signal to the microelectromechanical system sensors, wherein the microelectromechanical system sensor includes a supporter provided on a surface of a substrate, an elastic member having one end connected to the supporter, such that the oscillator is supported by another end of the elastic member in a suspended state over the surface of the substrate and displaceable relatively to the substrate, and a driving electrode connected to the supporter via the elastic member for electromagnetically driving the oscillator.
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6. An active sensor comprising:
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a microelectromechanical system sensor including a supporter provided on a surface of a substrate, an elastic member having one end connected to the supporter, an oscillator supported by another end of the elastic member in a suspended state over the surface of the substrate, the oscillator being displaceable for the substrate, and a driving electrode connected to the supporter via the elastic member for electromagnetically driving the oscillator; and a driving unit for detecting an oscillation of the oscillator, amplifying a signal representing the detected oscillation, and inputting the amplified signal as a driving signal to the microelectromechanical system sensor.
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7. A microelectromechanical system sensor driving device for driving a microelectromechanical system sensor including an oscillator, the microelectromechanical system sensor driving device comprising:
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a detecting unit detecting an oscillation of the oscillator; and a feedback unit performing amplification of a signal representing the oscillation detected by the detecting unit and input of the amplified signal as a driving signal to the microelectromechanical system sensors, wherein the microelectromechanical system sensor includes a supporter provided on a surface of a substrate, an elastic member having one end connected to the supporter, such that the oscillator is supported by another end of the elastic member in a suspended state over the surface of the substrate and displaceable relatively to the substrate, and a driving electrode connected to the supporter via the elastic member for electromagnetically driving the oscillator.
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8. An active sensor comprising:
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a microelectromechanical system sensor including a supporter provided on a surface of a substrate, an elastic member having one end connected to the supporter, an oscillator supported by another end of the elastic member in a suspended state over the surface of the substrate, the oscillator being displaceable for the substrate, and a driving electrode connected to the supporter via the elastic member for electromagnetically driving the oscillator; and a driving unit performing detection of an oscillation of the oscillator, amplification of a signal representing the detected oscillation, and input of the amplified signal as a driving signal to the microelectromechanical system sensor.
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Specification