Photoresist management system
First Claim
1. A system comprising:
- a holder that can removably receive a chemical container;
a chemical supply structure associated with the holder and adapted to be coupled to a semiconductor processing module, wherein when the chemical container is removably disposed in the holder, the chemical supply structure can carry a chemical away from the chemical container;
an identification (ID) reader associated with the holder, wherein when the chemical container is removably disposed in the holder the ID reader automatically communicates with a container ID unit associated with the chemical container; and
a control module coupled to the ID reader and adapted to be coupled to the semiconductor processing module; and
a network and database that communicates with the control module, wherein the database maintains chemical information including chemical versus holder table information, an ID reading schedule, current chemical content amount, chemical expiration date, and other chemical information.
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Accused Products
Abstract
The present disclosure provides a system and method for managing photoresist fabrication. In one example, the system includes a holder that can removably receive a chemical container. The system includes chemical supply structure associated with the holder and adapted to be coupled to a processing module, wherein when a chemical container is removably disposed in the holder the chemical supply structure can carry a chemical away from the chemical container. The system includes an identification (ID) reader associated with the holder, wherein when a chemical container is removably disposed in the holder the ID reader automatically communicates with a container ID unit associated with the chemical container. The system includes a control module coupled to the ID reader and adapted to be coupled to a processing module.
20 Citations
18 Claims
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1. A system comprising:
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a holder that can removably receive a chemical container; a chemical supply structure associated with the holder and adapted to be coupled to a semiconductor processing module, wherein when the chemical container is removably disposed in the holder, the chemical supply structure can carry a chemical away from the chemical container; an identification (ID) reader associated with the holder, wherein when the chemical container is removably disposed in the holder the ID reader automatically communicates with a container ID unit associated with the chemical container; and a control module coupled to the ID reader and adapted to be coupled to the semiconductor processing module; and a network and database that communicates with the control module, wherein the database maintains chemical information including chemical versus holder table information, an ID reading schedule, current chemical content amount, chemical expiration date, and other chemical information. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method for managing chemical sources, comprising:
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replacing a chemical container having a container identification (ID) unit associated therewith to a holder; automatically reading chemical information from the container ID unit; matching the chemical information to the holder; repeating the replacing and reading if the matching is not acceptable; monitoring the container ID unit to generate an alarm for a chemical replacement; updating the container ID unit by writing back chemical content volume thereto; and sharing the chemical information from the container ID unit with other manufacturing tools. - View Dependent Claims (15, 16, 17, 18)
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Specification