Method of characterizing a chamber based upon concurrent behavior of selected plasma parameters as a function of plural chamber parameters

• US 7,452,824 B2
• Filed: 12/11/2006
• Issued: 11/18/2008
• Est. Priority Date: 05/16/2003
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Gold, Ezra Robert, Hoffman, Daniel J.
• Primary Examiner(s): Vinh; Lan
• Application Number:
  US11/608,964
• Publication Number:
  US 20070080138A1
• Time in Patent Office: 708 Days
• Field of Search: 438/706, 438/710, 438/712, 438/714, 438/720, 438/9, 216/59, 216/61
• US Class Current: 438/714
• CPC Class Codes: H01J 37/32174 Circuits specially adapted for controlling the RF discharge
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge

Abstract

The invention involves a method of characterizing a plasma reactor chamber through the behavior of many selected plasma parameters as functions of many selected chamber parameters. The plasma parameters may be selected from a group including ion density, wafer voltage, etch rate and wafer current or other plasma parameters. The chamber parameters are selected from a group including source power, bias power, chamber pressure, magnetic coil current in different magnetic coils, gas flow rates in different gas injection zones and species composition of the gas in different gas injection zones.

Claims

1. A method of operating a plasma reactor chamber with respect to plural plasma parameters, by controlling plural chamber parameters, said method comprising:

characterizing the reactor chamber by performing the steps of;

a. for each one of said chamber parameters, ramping an input level of the one chamber parameter while sampling RF electrical parameters at an RF bias power input to said wafer support pedestal and computing from each sample of said RF electrical parameters the values of said plural plasma parameters, and storing said values with the corresponding levels of said one chamber parameter as corresponding chamber parameter data;

b. for each one of said chamber parameters, deducing, from the corresponding chamber parameter data, a single variable function for each of said plural plasma parameters having said one chamber parameter as an independent variable, so as to produce a set of said functions corresponding to all of said chamber parameters;

c. from said set of functions, constructing surfaces defining simultaneous values of all of said chamber parameters, each respective surface corresponding to each constant value of one of said plural plasma parameters, said surfaces spanning a range of said values, and storing said surfaces;

controlling a plasma in the chamber during processing of a production wafer in the chamber in accordance with user-selected values of each of said plural plasma parameters by performing the following steps;

a. for each one of said plural plasma parameters, fetching a relevant surface of constant value corresponding to the user-selected value of said one plasma parameter, and determining an intersection of the relevant surfaces which defines a target value for each of said chamber parameters; and

b. setting each of said chamber parameters to the corresponding target value.

2. The method of claim 1 wherein the number of said plural plasma parameters equals the number of said plural chamber parameters.

3. The method of claim 1, wherein the number of said plural chamber parameters is N and is greater than the number of said plural plasma parameters, said method further comprising:

controlling a plasma in the chamber during processing of a production wafer in the chamber in accordance with user-selected values of each of said plural plasma parameters by performing the following steps;

a. for each one of said plural plasma parameters, fetching a relevant surface of constant value corresponding to the user-selected value of said one plasma parameter, and determining an intersection of the relevant surfaces which defines a line in an N-dimensional space whose dimensions are the plural chamber parameters; and

b. varying said source power, bias power and the pressure in said chamber, respectively, along said line.

4. The method of claim 1 wherein the number of said plural chamber parameters is four.

5. The method of claim 1 wherein the number of said plural chamber parameters is five.

6. The method of claim 1 wherein said plurality of plasma parameters are selected from a group comprising ion density, wafer voltage, etch rate and wafer current.

7. The method of claim 6 wherein said plural chamber parameters are selected from a group comprising source power, bias power, chamber pressure, magnetic coil current in different magnetic coils, gas flow rates in different gas injection zones and species composition of the gas in different gas injection zones.

8. A method of operating a plasma reactor chamber with respect to plural plasma parameters, by controlling plural chamber parameters, said method comprising:

characterizing the reactor chamber by performing the steps of;

a. for each one of said chamber parameters, ramping an input level of the one chamber parameter while sampling RF electrical parameters at an RF bias power input to said wafer support pedestal and computing from each sample of said RF electrical parameters the values of said plural plasma parameters, and storing said values with the corresponding levels of said one chamber parameter as corresponding chamber parameter data;

b. for each one of said chamber parameters, deducing, from the corresponding chamber parameter data, a single variable function for each of said plural plasma parameters having said one chamber parameter as an independent variable, so as to produce a set of said functions corresponding to all of said chamber parameters;

c. from said set of functions, constructing surfaces defining simultaneous values of all of said chamber parameters, each respective surface corresponding to each constant value of one of said plural plasma parameters, said surfaces spanning a range of said values, and storing said surfaces;

wherein the step of constructing surfaces defining simultaneous values of all of said chamber parameters further comprises the following carried out for each one of said plural plasma parameters;

combining the single variable functions dependent upon respective single variables of source power, bias power and chamber pressure into a single composite function having three variables of source power, bias power and chamber pressure;

setting the composite function equal to a succession of values of the respective plasma parameter.

9. The method of claim 8 wherein the step of constructing surfaces defining simultaneous values of all of said chamber parameters further comprises the following step carried out for each one of said plural plasma parameters:

for each one of said succession of values, solving for a surface defining a set of simultaneous values of source power, bias power and chamber pressure for which the respective plasma parameter has the one value.

10. A method of operating a plasma reactor chamber with respect to plural plasma parameters, by controlling plural chamber parameters, said method comprising:

characterizing the reactor chamber by performing the steps of;

a. for each one of said chamber parameters, ramping an input level of the one chamber parameter while sampling RF electrical parameters at an RF bias power input to said wafer support pedestal and computing from each sample of said RF electrical parameters the values of said plural plasma parameters, and storing said values with the corresponding levels of said one chamber parameter as corresponding chamber parameter data;

b. for each one of said chamber parameters, deducing, from the corresponding chamber parameter data, a single variable function for each of said plural plasma parameters having said one chamber parameter as an independent variable, so as to produce a set of said functions corresponding to all of said chamber parameters;

c. from said set of functions, constructing surfaces defining simultaneous values of all of said chamber parameters, each respective surface corresponding to each constant value of one of said plural plasma parameters, said surfaces spanning a range of said values, and storing said surfaces;

wherein the sampling RF electrical parameters at an RF bias power input to said wafer support pedestal comprises sensing an input impedance, an input current and an input voltage to a transmission line coupled between a bias power impedance match circuit and an electrode within the wafer pedestal;

wherein the computing from each sample of said RE electrical parameters the values of plural plasma parameters is carried out separately for plasma parameters of ion density, wafer voltage and etch rate.

11. The method of claim 10 wherein the step of computing from each sample of said RF electrical parameters the values of plural plasma parameters comprises:

computing a junction admittance of a junction between said transmission line and the electrode within the wafer pedestal from said input impedance, input current and input voltage and from parameters of the transmission line.

12. The method of claim 11 wherein the step of computing from each sample of said RF electrical parameters the values of plural plasma parameters further comprises:

providing shunt electrical quantities of a shunt capacitance between the electrode and a ground plane;

providing load electrical quantities of a load capacitance between the electrode and a wafer on the pedestal.

13. The method of claim 12 wherein the step of computing from each sample of said RF electrical parameters the values of plural plasma parameters further comprises:

computing said etch rate, plasma ion density and wafer voltage from said junction admittance, said shunt electrical quantities, said load electrical quantities and a frequency of RF bias power applied to said electrode.

14. The method of claim 13 wherein said parameters of said transmission line comprise a length of said transmission line, a characteristic impedance of said transmission line and a complex loss factor of said transmission line.

15. The method of claim 14 wherein said shunt electrical quantities are computed from the size of an electrode-to-ground gap length, an area of said wafer, an electrode-to-ground dielectric constant and an electrode-to-ground conductive loss component.

16. The method of claim 15 wherein said load electrical quantities are computed from an electrode-to-wafer gap length, an area of the wafer, an electrode-to-wafer dielectric constant and an electrode-to-wafer conductive loss component.

17. The method of claim 16 wherein the step of computing said etch rate, plasma ion density and wafer voltage comprises:

first computing said wafer voltage and an imaginary part of a plasma admittance comprising a plasma susceptance, and computing said ion density and etch rate from said wafer voltage and said plasma susceptance.