Measurement of the dynamic characteristics of interferometric modulators
First Claim
Patent Images
1. A method of testing a plurality of interferometric modulators, the method comprising:
- applying a voltage waveform to the interferometric modulators to change the state of the interferometric modulators between an actuated and a released state, or a released state and an actuated state;
detecting light reflected from the interferometric modulators as a function of time while applying said voltage waveform; and
determining at least one response time parameters of the interferometric modulators based on said detecting, wherein the at least one parameter comprises one of the following;
a positive actuation response time (Tpa), a negative actuation response time (Tna), a positive release response time (Tpr), and a negative release response time (Tnr).
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Abstract
Various systems and methods of lighting a display are disclosed. In one embodiment, for example, a method includes applying a voltage waveform to the interferometric modulators, applying a voltage pulse to the interferometric modulators, detecting reflectivity of light from the interferometric modulators, and determining one or more quality parameters of the interferometric modulators based on the detecting reflectivity of light, where the applied voltage pulse causes the interferometric modulators to vary between an actuated and a non-actuated state, or an non-actuated state and an actuated state.
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Citations
73 Claims
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1. A method of testing a plurality of interferometric modulators, the method comprising:
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applying a voltage waveform to the interferometric modulators to change the state of the interferometric modulators between an actuated and a released state, or a released state and an actuated state; detecting light reflected from the interferometric modulators as a function of time while applying said voltage waveform; and determining at least one response time parameters of the interferometric modulators based on said detecting, wherein the at least one parameter comprises one of the following;
a positive actuation response time (Tpa), a negative actuation response time (Tna), a positive release response time (Tpr), and a negative release response time (Tnr). - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A system for testing a plurality of interferometric modulators, comprising:
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an illumination source adapted to provide incident light to a plurality of interferometric modulators; a voltage source configured to apply a voltage waveform to the interferometric modulators to vary the interferometric modulators between an actuated and a released state, or a released state and an actuated state; an optical detector configured to detect light reflected from the plurality of interferometric modulators and produce a signal corresponding to the detected light; and
a computer configured to receive the signal from the optical detector and determine at least one response time parameters of the interferometric modulators based on the signal, wherein the at least one parameter comprises one of the following;
a positive actuation response time (Tpa), a negative actuation response time (Tna), a positive release response time (Tpr), and a negative release response time (Tnr). - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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28. A system for testing a plurality of interferometric modulators, comprising:
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means for providing light to the plurality of interferometric modulators; means for applying a voltage waveform to the interferometric modulators to vary the interferometric modulators between an actuated and a released state, or a released state and an actuated state; means for detecting light reflected from the plurality of interferometric modulators; means for producing a signal corresponding to the detected light; and means for determining at least one response time parameters of the interferometric modulators based on the signal, wherein the at least one parameter comprises one of the following;
a positive actuation response time (Tpa), a negative actuation response time (Tna), a positive release response time (Tpr), and a negative release response time (Tnr). - View Dependent Claims (29, 30, 31, 32, 33, 34, 35, 36)
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37. A method of testing a plurality of interferometric modulators, the method comprising:
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applying a voltage waveform to the interferometric modulators to vary the interferometric modulators between an actuated state and a released state, or a released state and an actuated state wherein the voltage applied to change the state of the interferometric modulators is applied while the interferometric modulators are subject to a bias voltage; detecting light reflected from the interferometric modulators while applying the voltage waveform; and determining at least one response time parameters of at least a portion of the interferometric modulators based on said detecting the reflected light, wherein the at least one parameter comprises one of the following;
a positive actuation response time (Tpa), a negative actuation response time (Tna), a positive release response time (Tpr), and a negative release response time (Tnr). - View Dependent Claims (38, 39, 40, 41)
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42. A system of testing a plurality of interferometric modulators comprising:
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a voltage source configured to apply a voltage waveform to the interferometric modulators to vary the interferometric modulators between an actuated and a released state, or a released state and an actuated state, a light source positioned to illuminate the interferometric modulators; a detector disposed to receive light from the interferometric modulators and produce a corresponding signal; and a computer configured to receive the signal from the detector and determine, based on the signal, at least one response time parameters of at least a portion of the interferometric modulators during application of an actuation voltage or a release voltage, wherein the at least one parameter comprises one of the following;
a positive actuation response time (Tpa), a negative actuation response time (Tna), a positive release response time (Tpr), a negative release response time (Tnr). - View Dependent Claims (43, 44)
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45. A system for testing a plurality of interferometric modulators comprising:
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means for applying a voltage waveform to the interferometric modulators to vary the interferometric modulators between an actuated and a released state, or a released state and an actuated state; means for illuminating the interferometric modulators; means for sensing light reflected from the interferometric modulators and producing a corresponding signal; and means for determining, based on the signal, at least one response time parameters of the interferometric modulators during application of an actuation voltage or a release voltage, wherein the at least one parameter comprises one of the following;
a positive actuation response time (Tpa), a negative actuation response time (Tna), a positive release response time (Tpr), and a negative release response time (Tnr). - View Dependent Claims (46, 47, 48, 49, 50, 51)
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52. A method of manufacturing a system for testing a plurality of interferometric modulators comprising:
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providing a voltage source configured to apply a voltage waveform to the interferometric modulators to vary the interferometric modulators between an actuated and a released state, or released state and an actuated state; positioning a light source to illuminate the interferometric modulators; positioning a detector to receive light reflected from the interferometric modulators and produce a corresponding signal; and coupling a computer to the detector, the computer configured receive the signal from the detector to determine, based on the signal, at least one response time parameters of the interferometric modulators during application of an actuation voltage or a release voltage, wherein the at least one parameter comprises one of the following;
a positive actuation response time (Tpa), a negative actuation response time (Tna), a positive release response time (Tpr), and a negative release response time (Tnr). - View Dependent Claims (53)
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54. A method of testing a plurality of interferometric modulators, the method comprising:
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setting a time period during which to apply a switching voltage level, said switching voltage level being sufficient to change the interferometric modulators between a released state and an actuated state, or an actuated state and a released state; applying a voltage waveform comprising the switching voltage level for the time period; detecting light reflected from the interferometric modulators; determining one or more response time parameters of the interferometric modulators based on said detecting; and repeating said setting, applying, detecting, and determining step to identify a minimum time period during which a threshold value is achieved, the threshold value indicated a pre-determined number of pixels have actuated or released. - View Dependent Claims (55, 56, 57, 58, 59, 60, 61)
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62. A system for testing a plurality of interferometric modulators, comprising:
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a computer configured to determine a time period during which to apply a switching voltage level, said switching voltage level being sufficient to change a predetermined number of interferometric modulators between a released state and an actuated state, or an actuated state and a released state; a voltage source controlled by said computer, said voltage source configured to apply a voltage waveform comprising the switching voltage level for the time period; a light source positioned to illuminate the interferometric modulators; and a detector positioned to receive light reflecting from the interferometric modulators and produce a signal corresponding to the received light, wherein said computer is configured to receive the signal from the detector, and based on the signal, to iteratively vary the length of time for applying the voltage waveform to identify a minimum time period during which the number of pixels have actuated or released during the determined time period meets a threshold value, and to determine one or more response time parameters based on the identical minimum time period. - View Dependent Claims (63, 64)
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65. A system for testing a plurality of interferometric modulators, comprising:
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means for determining a time period during which to apply a switching voltage level, said switching voltage level being sufficient to change the interferometric modulators between a non-actuated state and an actuated state, or an actuated state and a non-actuated state; means for applying a controlled by said computer, said voltage source configured to apply a voltage waveform comprising the switching voltage level for the time period; means for illuminating the interferometric modulators; and means for sensing light reflected from the interferometric modulators and produce a signal corresponding to the received light, wherein said determining means receives the signal from the sensing means and determines one or more response time parameters based on the signal, and said determining a time period means is further configured to iteratively control the application of a voltage waveform for a determined time period to identify a minimum time period where the number of pixels have actuated or released during the determined time period meets a threshold value. - View Dependent Claims (66, 67, 68, 69, 70, 71)
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72. A method of manufacturing a system for testing a plurality of interferometric modulators, comprising:
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providing a computer configured to determine a time period during which to apply a switching voltage level, said switching voltage level being sufficient to change the interferometric modulators between a released state and an actuated state, or an actuated state and a released state; coupling a voltage source said computer, said voltage source configured to apply a voltage waveform comprising the switching voltage level for the time period; positioning a light source to illuminate the interferometric modulators; and positioning a detector to receive light reflecting from the interferometric modulators and produce a signal corresponding to the received light, wherein said computer is configured to receive the signal from the detector, and based on the signal, to iteratively vary the length of time for applying the voltage waveform to identify a minimum time period during which the number of pixels have actuated or released during the determined time period meets a threshold value and to determine one or more response time parameters based on the identical minimum time period. - View Dependent Claims (73)
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Specification