Microelectromechanical systems having stored charge and methods for fabricating and using same
First Claim
1. A method for use in association with an electromechanical device having a substrate and an encapsulation structure, the encapsulation structure being disposed over at least a portion of the substrate and defining at least a portion of a chamber, the electromechanical device further having a micromechanical structure that includes a mechanical structure disposed in the chamber, the method comprising:
- supplying electrical charge to the mechanical structure of the micromechanical structure; and
storing at least a portion of the electrical charge on the mechanical structure for a period of at least one day;
wherein the mechanical structure includes a first electrode disposed in the chamber, the micromechanical structure further includes a second electrode disposed in the chamber, and the method further includes supplying energy to cause relative movement between at least one portion of the first electrode and at least one portion of the second electrode.
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Accused Products
Abstract
Many inventions are disclosed. Some aspects are directed to MEMS, and/or methods for use with and/or for fabricating MEMS, that supply, store, and/or trap charge on a mechanical structure disposed in a chamber. Various structures may be disposed in the chamber and employed in supplying, storing and/or trapping charge on the mechanical structure. In some aspects, a breakable link, a thermionic electron source and/or a movable mechanical structure are employed. The breakable link may comprise a fuse. In one embodiment, the movable mechanical structure is driven to resonate. In some aspects, the electrical charge enables a transducer to convert vibrational energy to electrical energy, which may be used to power circuit(s), device(s) and/or other purpose(s). In some aspects, the electrical charge is employed in changing the resonant frequency of a mechanical structure and/or generating an electrostatic force, which may be repulsive.
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Citations
37 Claims
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1. A method for use in association with an electromechanical device having a substrate and an encapsulation structure, the encapsulation structure being disposed over at least a portion of the substrate and defining at least a portion of a chamber, the electromechanical device further having a micromechanical structure that includes a mechanical structure disposed in the chamber, the method comprising:
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supplying electrical charge to the mechanical structure of the micromechanical structure; and storing at least a portion of the electrical charge on the mechanical structure for a period of at least one day; wherein the mechanical structure includes a first electrode disposed in the chamber, the micromechanical structure further includes a second electrode disposed in the chamber, and the method further includes supplying energy to cause relative movement between at least one portion of the first electrode and at least one portion of the second electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37)
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Specification