Lithographic apparatus and device manufacturing method utilizing a positioning device for positioning an object table

• US 7,456,935 B2
• Filed: 04/05/2005
• Issued: 11/25/2008
• Est. Priority Date: 04/05/2005
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Hol, Sven Antoin Johan, Cox, Henrikus Herman Marie, Vosters, Petrus Matthijs Henricus
• Primary Examiner(s): NGUYEN, HUNG
• Application Number:
  US11/098,608
• Publication Number:
  US 20060221323A1
• Time in Patent Office: 1,330 Days
• Field of Search: 355/53, 355 72- 76, 310/10, 310/12, 318/135, 318/632
• US Class Current: 355/72
• CPC Class Codes: G03F 7/70716 Stages
• CPC Class Codes: G03F 7/70758 Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
• CPC Class Codes: G03F 7/70791 Large workpieces, e.g. glass substrates for flat panel displays or solar panels
• CPC Class Codes: H01L 21/67709 using magnetic elements

Abstract

A positioning device for positioning an object table includes a frame for supporting the object table in a first direction and a motor constructed and arranged to exert a first force on the object table in a second direction substantially perpendicular to the first direction and a second force on the object table in a third direction substantially perpendicular to the first direction and the second direction. A first part of the motor is constructed and arranged to co-operate with a second part for generating the first and second force. The first part is arranged on the object table, such that both the first force and the second force are directed substantially through the center of gravity of the object table.

Claims

1. A positioning device for positioning an object table, comprising

a frame that supports the object table in a first direction;

and

a coil unit and a magnet assembly, the coil unit arranged to cooperate with the magnet assembly to generate first and second forces exerted on the object table, the first force being exerted on the object table in a second direction substantially perpendicular to the first direction and the second force being exerted on the object table in a third direction substantially perpendicular to the first direction and the second direction,

wherein the coil unit is arranged on the object table, such that both the first force and the second force are directed substantially through a center of gravity of the object table.

2. The positioning device of claim 1, wherein:

the coil unit comprises a plurality of coils arranged adjacent to each other in the second direction; and

the magnet assembly comprises a single-sided magnet assembly, the single-sided magnet assembly comprising an array of permanent magnets.

3. The positioning device of claim 1, wherein the coil unit is arranged in a plane substantially parallel to the first and the second directions.

4. The positioning device of claim 1, further comprising a second coil unit and a second magnet assembly, the second coil unit and second magnet assembly being arranged on a side of the center of gravity of the object table opposite the first coil unit and first magnet assembly.

5. The positioning device of claims 2, further comprising:

a multi-phase power supply that supplies a multi-phase current to the two or more coils and a control unit for controlling a commutation angle and amplitude of the multi-phase current.

6. A lithographic apparatus, comprising:

an illumination system that supplies a beam of radiation;

a patterning arrangement that patterns the beam;

a projection system that projects the patterned beam onto a target portion of the substrate; and

a positioning device that supports a substrate on an object table, comprising,

a frame that supports the object table in a first direction, and

a coil unit and a magnet assembly, the coil unit arranged to cooperate with the magnet assembly to generate first and second forces exerted on the object table, the first force being exerted on the object table in a second direction substantially perpendicular to the first direction and the second force being exerted on the object table in a third direction substantially perpendicular to the first direction and the second direction,

wherein the coil unit is arranged on the object table, such that both the first force and the second force are directed substantially through a center of gravity of the object table.

7. The apparatus of claim 6, wherein the patterning arrangement comprises an array of individually controllable elements.

8. The apparatus of claim 6, wherein the projection system comprises an array of projection elements.

9. The apparatus of claim 6, wherein the projection system and metrology system are mounted on the frame.

10. The apparatus of claim 6, further comprising:

a preconditioning system for thermally preconditioning the substrate.

11. A positioning device for positioning an object table, comprising:

an object table;

a frame that supports the object table in a first direction; and

a coil unit and a magnet assembly, the coil unit cooperating with the magnet assembly to generate a first force on the object table in a second direction substantially perpendicular to the first direction and a second force on the object table in a third direction substantially perpendicular to the first direction and the second direction,

wherein the coil unit comprises a plurality of coils arranged adjacent to each other in the second direction,

wherein the magnet assembly comprises a single-sided magnet assembly, the single-sided magnet assembly comprising an array of permanent magnets, and

wherein the coil unit is arranged on the object table, such that both the first force and the second force are directed substantially through a center of gravity of the object table.

12. A positioning device for positioning an object table, comprising

an object table;

a frame that supports the object table in a first direction; and

a motor that exerts a first force on the object table in a second direction substantially perpendicular to the first direction and a second force on the object table in a third direction substantially perpendicular to the first direction and the second direction, wherein,

a first part of the motor comprises a coil unit of a first motor, the coil unit comprising a plurality of coils arranged adjacent to each other in the second direction, each of the coils comprising two coil sides extending in the third direction and two end turn parts, and

a second part of the motor comprises a magnet assembly of the first motor, the magnet assembly comprising two arrays of permanent magnets arranged on both sides of the coil unit,

the coil unit is arranged asymmetrically between the two arrays of permanent magnets, such that substantially only one of the end turn parts of each coil is arranged in a magnetic field of the two arrays of pennanent magnets.

13. A device manufacturing method, comprising

patterning a bean of radiation;

arranging a substrate on an object table;

supporting the object table by a base frame in a first direction;

projecting the patterned beam onto a target portion of the substrate;

generating a first force on the object table in a second direction substantially perpendicular to the first direction and a second force on the object table in a third direction substantially perpendicular to the first direction and the second direction; and

directing the generated first force and the generated second force substantially through a center of gravity of the object table to displace the object table relative to the patterned beam.

14. A positioning device for positioning an object table, comprising

a frame configured to support the object table in a first direction;

and

a coil unit arranged to cooperate with a magnet assembly to exert a first force on the object table in a second direction and a second force on the object table in a third direction,

wherein the second direction of the first force and the third direction of the second force pass substantially through a center of gravity of the object table.

15. A positioning device for positioning an object table, comprising

a frame that supports the object table in a first direction;

and

a coil unit and a magnet assembly, the coil unit arranged to cooperate with the magnet assembly to generate first and second forces exerted on the object table, the first force being exerted on the object table in a second direction substantially perpendicular to the first direction and the second force being exerted on the object table in a third direction substantially perpendicular to the first direction and the second direction,

wherein the coil unit is arranged on the object table, such that both the first force and the second force are directed substantially through a center of gravity of the object table,

wherein the coil unit comprises a plurality of coils arranged adjacent to each other in the second direction, wherein each of the coils comprises two coil sides extending in the third direction and two end turn parts,

wherein the magnet assembly comprises two arrays of permanent magnets arranged on both sides of the coil unit, and

wherein the coil unit is arranged asymmetrically between the two arrays of permanent magnets, such that substantially only one of the end turn parts of each coil is arranged in a magnetic field of the two arrays of permanent magnets.

16. A positioning device for positioning an object table, comprising

a frame that supports the object table in a first direction;

a first coil unit and a first magnet assembly, the first coil unit arranged to cooperate with the first magnet assembly to generate first and second forces exerted on the object table, the first force being exerted on the object table in a second direction substantially perpendicular to the first direction and the second force being exerted on the object table in a third direction substantially perpendicular to the first direction and the second direction,

wherein the first coil unit is arranged on the object table, such that both the first force and the second force are directed substantially through a center of gravity of the object table,

wherein the first coil unit comprises a plurality of coils arranged adjacent to each other in the second direction, wherein each of the coils comprises two coil sides extending in the third direction and two end turn parts,

wherein the first magnet assembly comprises two arrays of permanent magnets arranged on both sides of the coil unit, and

wherein the first coil unit is arranged asymmetrically between the two arrays of permanent magnets, such that substantially only one of the end turn parts of each coil is arranged in a magnetic field of the two arrays of permanent magnets; and

a second coil unit and a second magnet assembly, the second coil unit and second magnet assembly being arranged on a side of the center of gravity of the object table opposite the first coil unit and first magnet assembly.

17. A positioning device for positioning an object table, comprising

a frame that supports the object table in a first direction;

a coil unit and a magnet assembly, the coil unit arranged to cooperate with the magnet assembly to generate first and second forces exerted on the object table, the first force being exerted on the object table in a second direction substantially perpendicular to the first direction and the second force being exerted on the object table in a third direction substantially perpendicular to the first direction and the second direction,

wherein the coil unit is arranged on the object table, such that both the first force and the second force are directed substantially through a center of gravity of the object table,

wherein the coil unit comprises a plurality of coils arranged adjacent to each other in the second direction, wherein each of the coils comprises two coil sides extending in the third direction and two end turn parts,

wherein the magnet assembly comprises two arrays of permanent magnets arranged on both sides of the coil unit, and

wherein the coil unit is arranged asymmetrically between the two arrays of permanent magnets, such that substantially only one of the end turn parts of each coil is arranged in a magnetic field of the two arrays of permanent magnets; and

a multi-phase power supply that supplies a multi-phase current to the two or more coils and a control unit for controlling a commutation angle and amplitude of the multi-phase current.

18. A positioning device for positioning an object table, comprising

a frame that supports the object table in a first direction;

and

a coil unit and a magnet assembly, the coil unit arranged to cooperate with the magnet assembly to generate first and second forces exerted on the object table, the first force being exerted on the object table in a second direction substantially perpendicular to the first direction and the second force being exerted on the object table in a third direction substantially perpendicular to the first direction and the second direction,

wherein the coil unit is arranged on the object table, such that both the first force and the second force are directed substantially through a center of gravity of the object table,

wherein the coil unit comprises a plurality of coils and an actuator yoke provided with a coil,

wherein the magnet assembly comprises an array of permanent magnets arranged on a ferromagnetic yoke, and

wherein the coil and actuator yoke are constructed and arranged to generate a reluctance force between the ferromagnetic yoke and the actuator yoke, the force being directed substantially in the third direction.

19. A positioning device for positioning an object table, comprising

a frame that supports the object table in a first direction;

a first coil unit and a first magnet assembly, the first coil unit arranged to cooperate with the first magnet assembly to generate first and second forces exerted on the object table, the first force being exerted on the object table in a second direction substantially perpendicular to the first direction and the second force being exerted on the object table in a third direction substantially perpendicular to the first direction and the second direction,

wherein the first coil unit is arranged on the object table, such that both the first force and the second force are directed substantially through a center of gravity of the object table,

wherein the first coil unit comprises a plurality of coils and an actuator yoke provided with a coil,

wherein the first magnet assembly comprises an array of permanent magnets arranged on a ferromagnetic yoke, and

wherein the coil and actuator yoke are constructed and arranged to generate a reluctance force between the ferromagnetic yoke and the actuator yoke, the force being directed substantially in the third direction; and

a second coil unit and a second magnet assembly, the second coil unit and second magnet assembly being arranged on a side of the center of gravity of the object table opposite the first coil unit and first magnet assembly.

20. A positioning device for positioning an object table, comprising

a frame that supports the object table in a first direction;

a coil unit and a magnet assembly, the coil unit arranged to cooperate with the magnet assembly to generate first and second forces exerted on the object table, the first force being exerted on the object table in a second direction substantially perpendicular to the first direction and the second force being exerted on the object table in a third direction substantially perpendicular to the first direction and the second direction,

wherein the coil unit is arranged on the object table, such that both the first force and the second force are directed substantially through a center of gravity of the object table,

wherein the coil unit comprises a plurality of coils and an actuator yoke provided with a coil,

wherein the magnet assembly comprises an array of permanent magnets arranged on a ferromagnetic yoke, and

wherein the coil and actuator yoke are constructed and arranged to generate a reluctance force between the ferromagnetic yoke and the actuator yoke, the force being directed substantially in the third direction; and

a multi-phase power supply that supplies a multi-phase current to the two or more coils and a control unit for controlling a commutation angle and amplitude of the multi-phase current.