Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
First Claim
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1. A dual-axis sensor for measuring X and Y components of angular velocity in an X-Y sensor plane, the dual-axis sensor comprising:
- a first subsensor for measuring the X component of angular velocity; and
a second subsensor for measuring the Y component of angular velocity,wherein both the first subsensor for measuring the X component of angular velocity and the second subsensor for measuring the Y component of angular velocity are contained together within a single hermetic seal within the dual-axis sensor.
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Abstract
A dual-axis sensor for measuring X and Y components of angular velocity in an X-Y sensor plane is provided. The dual-axis sensor includes a first subsensor for measuring the X component of angular velocity, and a second subsensor for measuring the Y component of angular velocity. The first subsensor and the second subsensor are contained within a single hermetic seal within the dual-axis sensor.
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27 Claims
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1. A dual-axis sensor for measuring X and Y components of angular velocity in an X-Y sensor plane, the dual-axis sensor comprising:
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a first subsensor for measuring the X component of angular velocity; and a second subsensor for measuring the Y component of angular velocity, wherein both the first subsensor for measuring the X component of angular velocity and the second subsensor for measuring the Y component of angular velocity are contained together within a single hermetic seal within the dual-axis sensor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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