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Quartz-based nanoresonators and method of fabricating same

  • US 7,459,099 B2
  • Filed: 01/25/2005
  • Issued: 12/02/2008
  • Est. Priority Date: 04/30/2002
  • Status: Expired due to Term
First Claim
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1. A method useful for thinning a quartz substrate comprising:

  • providing a quartz substrate;

    removing a first portion of the quartz substrate using a first lap and polishing process;

    removing a second portion of the quartz substrate using a second lap and polishing process, wherein the second lap and polishing process uses softer chemical than the first lap and polishing process; and

    removing a third portion of the quartz substrate using reactive ion etching after removing the second portion, while simultaneously monitoring the thickness of the quartz substrate while removing the third portion, wherein the quartz substrate is stationary while removing the third portion and monitoring the thickness.

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