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Systems and methods for integrating focal plane arrays

  • US 7,459,686 B2
  • Filed: 11/30/2006
  • Issued: 12/02/2008
  • Est. Priority Date: 01/26/2006
  • Status: Active Grant
First Claim
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1. A wafer-level packaged focal plane array assembly, comprising:

  • a device wafer, said device wafer comprising a multi-band focal plane array; and

    a lid wafer, said lid wafer being at least partially transparent to visible and infrared radiation and being assembled to said device wafer so that said lid wafer allows visible radiation to reach said multi-band focal plane array through said lid wafer;

    wherein said multi-band focal plane array comprises a plurality of detector elements, each of said detector elements comprising;

    a substrate,read out integrated circuitry (ROIC) disposed on said substrate, said ROIC including visible imaging circuitry configured to detect visible radiation, andan infrared radiation detector structure configured to absorb infrared radiation, said infrared detector structure comprising a membrane supported at a position spaced above said substrate, said membrane having at least one opening defined therein and configured to allow visible spectrum radiation to reach said visible imaging circuitry through said membrane.

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