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Reprogrammable metal-to-metal antifuse employing carbon-containing antifuse material

  • US 7,459,763 B1
  • Filed: 02/20/2004
  • Issued: 12/02/2008
  • Est. Priority Date: 10/02/2001
  • Status: Expired due to Term
First Claim
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1. A reprogrammable metal-to-metal antifuse comprising:

  • an inter-metal dielectric layer having a via formed therethrough and filled with a metal plug;

    a lower Ti barrier layer disposed over said metal plug;

    a lower adhesion-promoting layer disposed over said lower Ti barrier layer;

    an antifuse material layer disposed above an upper surface of said lower adhesion-promoting layer, said antifuse material layer selected from a group comprising at least one of amorphous carbon and amorphous carbon doped with at least one of hydrogen and fluorine disposed over said lower adhesion-promoting layer;

    an upper adhesion-promoting layer disposed over said antifuse material layer; and

    an upper Ti barrier layer disposed over said upper adhesion-promoting layer,wherein;

    said lower adhesion-promoting layer and said upper adhesion-promoting layer each have a thickness of between about 2 angstroms and about 20 angstroms;

    the reprogrammable metal-to-metal antifuse is programmed in response to a programming potential applied across the antifuse; and

    the reprogrammable metal-to-metal antifuse is erased in response to an erasing potential, lower in magnitude than the programming potential, across the antifuse.

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