Inductively-coupled RF power source
First Claim
1. A system for implementing a power source, comprising:
- a power amplifier that generates a radio-frequency power signal with an adjustable operating frequency, said power amplifier also generating a reference phase signal derived from said radio-frequency power signal;
an impedance match that provides said radio-frequency power signal to a plasma coil that has a variable resonance condition;
a phase probe positioned adjacent to said plasma coil to generate a coil phase signal corresponding to said adjustable operating frequency; and
a phase-locked loop device that generates a drive signal to said power amplifier to control said adjustable operating frequency, said drive signal being based upon a phase relationship between said reference phase signal and said coil phase signal, said adjustable operating frequency then tracking said variable resonance condition.
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Accused Products
Abstract
A system and method are disclosed for implementing a power source including a power amplifier that generates a radio-frequency power signal with an adjustable operating frequency. The power amplifier also generates a reference phase signal that is derived from the radio-frequency power signal. An impedance match provides the radio-frequency power signal to a plasma coil that has a variable resonance condition. A phase probe is positioned adjacent to the plasma coil to generate a coil phase signal corresponding to the adjustable operating frequency. A phase-locked loop then generates an RF drive signal that is based upon a phase relationship between the reference phase signal and the coil phase signal. The phase-locked loop provides the RF drive signal to the power amplifier to control the adjustable operating frequency, so that the adjustable operating frequency then tracks the variable resonance condition.
51 Citations
21 Claims
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1. A system for implementing a power source, comprising:
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a power amplifier that generates a radio-frequency power signal with an adjustable operating frequency, said power amplifier also generating a reference phase signal derived from said radio-frequency power signal; an impedance match that provides said radio-frequency power signal to a plasma coil that has a variable resonance condition; a phase probe positioned adjacent to said plasma coil to generate a coil phase signal corresponding to said adjustable operating frequency; and a phase-locked loop device that generates a drive signal to said power amplifier to control said adjustable operating frequency, said drive signal being based upon a phase relationship between said reference phase signal and said coil phase signal, said adjustable operating frequency then tracking said variable resonance condition. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A method for implementing a power source, comprising:
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generating a radio-frequency power signal with an adjustable operating frequency by utilizing a power amplifier that also generates a reference phase signal derived from said radio-frequency power signal; utilizing an impedance match to provide said radio-frequency power signal to a plasma coil that has a variable resonance condition; positioning a phase probe adjacent to said plasma coil to generate a coil phase signal corresponding to said adjustable operating frequency; and generating a drive signal to said power amplifier from a phase-locked loop device to control said adjustable operating frequency, said drive signal being based upon a phase relationship between said reference phase signal and said coil phase signal, said adjustable operating frequency then tracking said variable resonance condition.
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Specification