Lithographic apparatus and device manufacturing method

• US 7,460,208 B2
• Filed: 02/18/2005
• Issued: 12/02/2008
• Est. Priority Date: 02/18/2005
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV), Micronic Laser Systems AB (Mycronic AB)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Bleeker, Arno Jan, Franken, Dominicus Jacobus Petrus Adrianus, Hoeks, Martinus Hendricus Hendricus, Kessels, Lambertus Gerardus Maria, Sandström, Tobrjörn
• Primary Examiner(s): Kim; Peter B
• Application Number:
  US11/061,754
• Publication Number:
  US 20060187428A1
• Time in Patent Office: 1,383 Days
• Field of Search: 355/55, 355/53, 355/67, 355/71, 345/697, 359/619, 359/290, 438/7
• US Class Current: 355/53
• CPC Class Codes: G03F 7/70291 Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
• CPC Class Codes: G03F 7/70833 Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
• CPC Class Codes: G03F 7/70875 Temperature, e.g. temperature control of masks or workpieces via control of stage temperature

Abstract

A lithographic apparatus provided with an array of individually controllable elements that is detachably mounted to mounting points on a support frame of the lithographic apparatus.

Claims

1. A lithographic apparatus, comprising:

a support frame having a mounting point;

first and second rows each including arrays of individually controllable elements configured to be used to modulate respective corresponding portions of a beam of radiation; and

a position sensor configured to measure a position of a first one of the arrays of individually controllable elements relative to at least a second one of the arrays of individually controllable elements of at least the first row within the apparatus.

2. The apparatus of claim 1, further comprising:

an actuator system that is associated with each of the arrays of individually controllable elements and that controls the position of each of the arrays of individually controllable elements relative to the support frame.

3. The apparatus of claim 2, wherein the actuator system controls the position of each of the arrays of individually controllable elements in six degrees of freedom.

4. The apparatus of claim 2, wherein each of the arrays of individually controllable elements is mounted to the mounting point through use of the associated actuator system, such that the actuator supports each of the arrays of individually controllable elements in addition to controlling their position.

5. The apparatus of claim 2, further comprising:

an illumination system that produces the beam of radiation that is modulated by the arrays of individually controllable elements;

a projection system that projects the modulated beam onto a target portion of a substrate;

a memory containing data representing a telecentricity error of an image formed on the substrate introduced by at least one of the illumination system and the projection system; and

a controller that controls the actuator system to set the position of the array of individually controllable elements such that an overall telecentricity error of the image projected onto the substrate is minimized.

6. The apparatus of claim 2, wherein the actuator system is attached to each of the arrays of individually controllable elements to form an integral unit that is replaceably attached to the mounting point.

7. The apparatus of claim 6, wherein the actuator system comprises:

three pairs of linearly acting actuators,

wherein each of the actuators is connected at one end to the support frame and at an other end to a support side of each of the arrays of individually controllable elements on an opposite side of each of the arrays of individually controllable elements than an active side for patterning a beam of radiation,

wherein the pairs of actuators are arranged such that on one of the support frame and the support side of each of the arrays of individually controllable elements both actuators of each pair are connected at the same point,

wherein on the other end of the support frame and the support side of each of the arrays of individually controllable elements the actuators of each pair are connected set apart from each other, and

wherein the separation of the mid point between set apart ends of the actuators of each pair is greater than the separation of connected ends of the pairs of actuators.

8. The apparatus of claim 7, wherein the linearly acting actuators are connected to each of the arrays of individually controllable elements and the support frame, such that the linearly acting actuators rotate relative to the corresponding arrays of individually controllable elements and the support frame, respectively.

9. The apparatus of claim 2, further comprising:

a balance mass; and

an associated balance mass actuator,

wherein the balance mass and the associated balance mass actuator provide to the support frame a force that is equal and opposite to the force applied to the support frame by the actuator system.

10. The apparatus of claim 9, wherein the balance mass and balance mass actuator apply force directly to the support frame.

11. The apparatus of claim 9, further comprising:

additional ones of the arrays of individually controllable elements and associated actuator systems,

wherein the balance mass and associated balance mass actuator provide to the support frame a force that is equal and opposite to the sum of the forces applied to the support frame by two or more of the actuator systems.

12. The apparatus of claim 1, further comprising:

a controller that controls each of the arrays of individually controllable elements; and

a flexible cable that individually connects the arrays of individually controllable elements to the controller to provide control signals.

13. The apparatus of claim 12, wherein the flexible cable is detachably attached to at least one of the controller and the arrays of individually controllable elements.

14. The apparatus of claim 12, wherein the controller is mounted on the support frame immediately adjacent to the mounting point of at least one of the arrays of individually controllable elements.

15. The apparatus of claim 1, wherein each of the arrays of individually controllable elements is comprised of:

a planar plate;

an active device containing the individually controllable elements bonded onto one surface of the planar plate; and

at least one connection point used to mount at least one of the arrays of individually controllable elements on the opposite surface of the planar plate to the surface on which the active device is bonded.

16. The apparatus of claim 15, further comprising:

a cooling element thermally connected to the planar plate of at least one of the arrays of individually controllable elements to form an integral unit that is replaceably attached to the mounting point.

17. The apparatus of claim 15, wherein the planar plate has a fluid conduit within it, and the lithographic apparatus further comprises:

a fluid cooling unit connected to the fluid conduit.

18. The apparatus of claim 17, further comprising:

a flexible fluid conduit that connects the fluid conduit within each of the arrays of individually controllable elements to the fluid cooling unit.

19. The apparatus of claim 1, further comprising:

a common reference frame,

wherein the position sensor system measures a position of each of the rows of individually controllable elements relative to the common reference frame, and wherein the position of at least one other component in the lithographic apparatus is measured relative to the common reference frame.

20. The apparatus of claim 1, wherein the position sensor system comprises:

at least one proximity sensor having a first part on the first one of the arrays of individual controllable elements and a second part on the second one of the arrays of individually controllable elements.

21. The apparatus of claim 1, wherein:

the first row of individually controllable elements has three mutually non-parallel faces substantially parallel to and adjacent to three corresponding faces on the second array of individually controllable elements;

the position sensor includes a proximity sensor associated with each of the three pairs of corresponding faces, each of the proximity sensors having a first part on one of the faces on the first one of the arrays of individually controllable elements and a second part on the corresponding face on the second one of the arrays of individually controllable elements.

22. The apparatus of claim 21, wherein the sensor system comprises:

two proximity sensors associated with each of the three pairs of corresponding faces.

23. The apparatus of claim 22, wherein the sensor system comprises:

additional proximity sensors, each of the additional proximity sensors having a first part on a face of the first one of the arrays of individually controllable elements and a second part on a substantially parallel, adjacent face on the second one of the arrays of individually controllable elements.

24. The apparatus of claim 1, further comprising:

an illumination system configured to condition the beam of radiation, which is modulated by the arrays of individually controllable elements; and

a projection system configured to project the modulated beam of radiation onto a portion of the substrate,

wherein at least one of illumination system, the projection system, and the substrate is wholly or partly mounted to the support frame.

25. A lithographic apparatus, comprising:

a support frame having a mounting point;

a row including an array of individually controllable elements configured to be used to modulate a beam of radiation;

an actuator system that is associated with the array of individually controllable elements and that is configured to control the position of the array of individually controllable elements relative to the support frame;

a balance mass; and

an associated balance mass actuator,

wherein the balance mass and the associated balance mass actuator provide to the support frame a force that is equal and opposite to the force applied to the support frame by the actuator system.

26. The apparatus of claim 25, wherein the actuator system controls the position of the array of individually controllable elements in six degrees of freedom.

27. The apparatus of claim 25, wherein the array of individually controllable elements is mounted to the mounting point through use of the associated actuator system, such that the actuator supports the array of individually controllable elements in addition to controlling its position.

28. The apparatus of claim 25, wherein the actuator system is attached to the array of individually controllable elements to form an integral unit that is replaceably coupled to the mounting point.

29. The apparatus of claim 28, wherein the actuator system comprises:

three pairs of linearly acting actuators,

wherein each of the actuators is connected at one end to the support frame and at an other end to a support side of the array of individually controllable elements on an opposite side of the array of individually controllable elements than an active side for patterning a beam of radiation, wherein the pairs of actuators are arranged such that on one of the support frame and the support side of the array of individually controllable elements both actuators of each pair are connected at the same point,

wherein on the other end of the support frame and the support side of the array of individually controllable elements the actuators of each pair are connected set apart from each other, and

wherein the separation of the mid point between set apart ends of the actuators of each pair is greater than the separation of connected ends of the pairs of actuators.

30. The apparatus of claim 29, wherein the linearly acting actuators are connected to the array of individually controllable elements and the support frame, such that the linearly acting actuators rotate relative to the array of individually controllable elements and the support frame, respectively.

31. The apparatus of claim 25, wherein the balance mass and balance mass actuator apply force directly to the support frame.

32. The apparatus of claim 25, further comprising:

a plurality of the array of individually controllable elements and associated actuator systems,

wherein the balance mass and associated balance mass actuator provide to the support frame a force that is equal and opposite to the sum of the forces applied to the support frame by two or more of the actuator systems.

33. The apparatus of claim 25, further comprising:

an illumination system that produces the beam of radiation that is modulated by the array of individually controllable elements;

a projection system that projects the modulated beam onto a target portion of a substrate;

a memory containing data representing a telecentricity error of an image formed on the substrate introduced by at least one of the illumination system and the projection system; and

a controller that controls the actuator system to set the position of the array of individually controllable elements such that an overall telecentricity error of the image projected onto the substrate is minimized.

34. A lithographic apparatus, comprising:

a support frame having a plurality of mounting points;

a plurality of rows each including arrays of individually controllable elements;

a common reference frame; and

a position sensor configured to measure a position of each of the plurality of arrays of individually controllable elements relative to the common reference frame,

wherein the position of at least one other component in the lithographic apparatus is measured relative to the common reference frame, and

wherein the position sensor measures a position of a first one of the plurality of the arrays of individually controllable elements relative to at least a second one of the plurality of the arrays of individually controllable elements within the apparatus.

35. The apparatus of claim 34, wherein the position sensor system comprises:

at least one proximity sensor having a first part on the first one of the plurality of the arrays of individual controllable elements and a second part on the second one of the plurality of the arrays of individually controllable elements.

36. The apparatus of claim 34, wherein:

the first one of the plurality of arrays of individually controllable elements has three mutually non-parallel faces substantially parallel to and adjacent to three corresponding faces on the second one of the plurality of arrays of individually controllable elements, the sensor system includes a proximity sensor associated with each of the three pairs of corresponding faces, and each of the proximity sensors having a first part on one of the faces on the first one of the plurality of the arrays of individually controllable elements and a second part on the corresponding face on the second one of the plurality of the arrays of individually controllable elements.

37. The apparatus of claim 36, wherein the sensor system comprises:

two proximity sensors associated with each of the three pairs of corresponding faces.

38. The apparatus of claim 37, wherein the sensor system comprises:

additional proximity sensors, each of the additional proximity sensors having a first part on a face of the first one of the plurality of the arrays of individually controllable elements and a second part on a substantially parallel, adjacent face on the second one of the plurality of the arrays of individually controllable elements.