Ultrasonic transducer for ranging measurement with high directionality using parametric transmitting array in air and a method for manufacturing same
First Claim
1. A multiple resonances type ultrasonic transducer for a ranging measurement using a parametric transmitting array in air, comprising:
- an ultrasonic actuator unit formed with a regularly mixing array of first unit actuators having a resonance frequency of f1 and second unit actuators having a resonance frequency of f2, for generating a difference frequency wave (fd=f1−
f2) with high directionality by forming a parametric transmitting array in air through generating two ultrasonic waves with high pressure in air; and
an ultrasonic sensor unit formed with one or more unit sensors having a resonance frequency of the difference frequency (fd=f1−
f2) , for sensing a reflected ultrasonic wave signal from a target,wherein the difference frequency (fd) is selected within a range of about 20kHz ˜
60kHz.
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Abstract
A multiple resonances type ultrasonic transducer for a ranging measurement with high directionality using a parametric transmitting array in air, includes an ultrasonic actuator unit formed with a regularly mixing array of first unit actuators having a resonance frequency of f1 and second unit actuators having a resonance frequency of f2. The ultrasonic actuator unit generates a difference frequency wave (fd=f1−f2) with high directionality by forming a parametric transmitting array in air through generating two ultrasonic waves with high pressure in air. Further, the transducer includes an ultrasonic sensor unit formed with one or more unit sensors having a resonance frequency of the difference frequency (fd=f1−f2), for sensing a reflected ultrasonic pulse signal from a target.
41 Citations
19 Claims
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1. A multiple resonances type ultrasonic transducer for a ranging measurement using a parametric transmitting array in air, comprising:
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an ultrasonic actuator unit formed with a regularly mixing array of first unit actuators having a resonance frequency of f1 and second unit actuators having a resonance frequency of f2, for generating a difference frequency wave (fd=f1−
f2) with high directionality by forming a parametric transmitting array in air through generating two ultrasonic waves with high pressure in air; andan ultrasonic sensor unit formed with one or more unit sensors having a resonance frequency of the difference frequency (fd=f1−
f2) , for sensing a reflected ultrasonic wave signal from a target,wherein the difference frequency (fd) is selected within a range of about 20kHz ˜
60kHz. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A method for manufacturing multiple resonances type ultrasonic transducer for a ranging measurement with high directionality using a parametric transmitting array in air, comprising the steps of:
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preparing an SOT (Silicon on Insulator) wafer with an intermediate oxidation layer; insulating the SOT wafer by forming thin oxidation layers on the top and the bottom surfaces of the wafer; forming a lower electrode, a piezoelectric body, and an upper electrode to be laminated in sequence on the top surface of the SOI wafer;
patterning the upper electrode, the piezoelectric body, and the lower electrode;forming an insulating layer for insulating the upper electrode and the lower electrode; forming a lining pattern by patterning the insulating layer; and forming the membrane portion by removing the lower side of the central portion of the wafer and the intermediate oxidation layer after removing the oxidation layer on the bottom surface of the wafer. - View Dependent Claims (19)
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Specification