×

Linear motor and stage device using the linear motor

  • US 7,462,959 B2
  • Filed: 11/15/2006
  • Issued: 12/09/2008
  • Est. Priority Date: 07/12/2004
  • Status: Expired due to Fees
First Claim
Patent Images

1. A linear motor, comprising:

  • a coil part having a plurality of coils forming a coil line;

    a magnet yoke part having a plurality of permanent magnets facing the coil line; and

    a coil cooling part configured to cool the coil part;

    wherein the coil cooling part includesa cooling panel having a heat conductive element, the heat conductive element transferring heat of the coil part to an outside; and

    a heat radiation part connected to the cooling panel, the heat radiation part being configured to radiate the heat transferred from the heat conductive element to the outside,wherein the heat conductive element is made of a heat pipe formed in an internal space of the cooling panel.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×