Linear motor and stage device using the linear motor
First Claim
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1. A linear motor, comprising:
- a coil part having a plurality of coils forming a coil line;
a magnet yoke part having a plurality of permanent magnets facing the coil line; and
a coil cooling part configured to cool the coil part;
wherein the coil cooling part includesa cooling panel having a heat conductive element, the heat conductive element transferring heat of the coil part to an outside; and
a heat radiation part connected to the cooling panel, the heat radiation part being configured to radiate the heat transferred from the heat conductive element to the outside,wherein the heat conductive element is made of a heat pipe formed in an internal space of the cooling panel.
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Abstract
A linear motor can include a coil part having a plurality of coils forming a coil line; a magnet yoke part having a plurality of permanent magnets facing the coil line; and a coil cooling part configured to cool the coil part. The coil cooling part can include a cooling panel having a heat conductive element, the heat conductive element transferring heat of the coil part to an outside; and a heat radiation part connected to the cooling panel, the heat radiation part being configured to radiate the heat transferred from the heat conductive element to the outside.
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Citations
18 Claims
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1. A linear motor, comprising:
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a coil part having a plurality of coils forming a coil line; a magnet yoke part having a plurality of permanent magnets facing the coil line; and a coil cooling part configured to cool the coil part; wherein the coil cooling part includes a cooling panel having a heat conductive element, the heat conductive element transferring heat of the coil part to an outside; and a heat radiation part connected to the cooling panel, the heat radiation part being configured to radiate the heat transferred from the heat conductive element to the outside, wherein the heat conductive element is made of a heat pipe formed in an internal space of the cooling panel. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A stage device, comprising:
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a linear motor; a slider driven by the linear motor; a stage configured to move with the slider; and a guide part configured to guide the moving of the stage; wherein the linear motor includes a coil part having a plurality of coil forming a coil line; a magnet yoke part having a plurality of permanent magnets facing the coil line; and a coil cooling part configured to cool the coil part; and wherein the coil cooling part includes a cooling panel having a heat conductive element, the heat conductive element transferring heat of the coil part to an outside; and a heat radiation part connected to the cooling panel, the heat radiation part being configured to radiate the heat from the heat conductive element to the outside, wherein the heat conductive element is made of a heat pipe formed in an internal space of the cooling panel. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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Specification