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Method of using a preferentially deposited lubricant to prevent anti-stiction in micromechanical systems

  • US 7,463,404 B2
  • Filed: 11/02/2006
  • Issued: 12/09/2008
  • Est. Priority Date: 11/23/2005
  • Status: Expired due to Fees
First Claim
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1. A method of operating a micromechanical device, comprising biasing one or more electrodes that are disposed within a processing region, wherein biasing the one or more electrodes causes a moveable component having a first contact surface to interact with a second contact surface, and wherein one or more normal operating conditions cause a lubricant molecule, which has a head group that is adapted to bond to a first surface disposed in the processing region, to migrate from the first surface to a space formed between the first and second contact surfaces during normal operation.

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