Method for fabricating microelectromechanical optical display devices
First Claim
Patent Images
1. An MEMO display device, comprising:
- a substrate;
an optical layer disposed on the substrate;
a plurality of posts disposed on the optical layer;
a reflective layer disposed on the plurality of posts; and
a flexible layer disposed on the reflective layer, wherein edge of the reflective layer is separated from edge of the flexible layer by a distance equal to or smaller than about 2 μ
m.
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Abstract
A microelectromechanical optical display devices is provided. An optical layer is disposed on a substrate. A plurality of posts are disposed on the optical layer. A reflective layer is disposed on the plurality of posts. A flexible layer is disposed on the reflective layer, wherein edge of the reflective layer is separated from edge of the flexible layer by a distance equal to or smaller than about 2 μm.
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Citations
18 Claims
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1. An MEMO display device, comprising:
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a substrate; an optical layer disposed on the substrate; a plurality of posts disposed on the optical layer; a reflective layer disposed on the plurality of posts; and a flexible layer disposed on the reflective layer, wherein edge of the reflective layer is separated from edge of the flexible layer by a distance equal to or smaller than about 2 μ
m. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification