Mass flow verifier with flow restrictor

• US 7,463,991 B2
• Filed: 03/03/2006
• Issued: 12/09/2008
• Est. Priority Date: 03/25/2005
• Status: Active Grant

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Shajii, Ali, Smith, Daniel
• Primary Examiner(s): Cosimano; Edward
• Assistant Examiner(s): Kundu; Sujoy K
• Application Number:
  US11/367,641
• Publication Number:
  US 20060217900A1
• Time in Patent Office: 1,012 Days
• Field of Search: 702/100, 702113-115, 73/11.6, 73/13.4, 73/3, 731/99, 738/61, 738/65
• US Class Current: 702/100
• CPC Class Codes: G01F 25/15 specially adapted for gas meters G01F25/11 - G01F25/14, G01F25/17 take precedence
• CPC Class Codes: G01F 25/17 using calibrated reservoirs

Abstract

A flow verifier for verifying measurement of a flow rate of a fluid by a device includes a flow restrictor that renders the flow rate verification substantially insensitive to elements upstream of the flow restrictor. The flow verifier includes a vessel that receives a flow of the fluid from the device, and a pressure sensor that measures pressure of the fluid within the vessel. An outlet valve regulates flow of the fluid out of the vessel. The flow restrictor is located adjacent to and upstream of the vessel, along a flow path of the fluid. The flow restrictor restricts the flow of the fluid so as to induce a shock in the flow path of the fluid, and sustains the shock during a time period sufficient to render the flow rate verification substantially insensitive to the elements upstream of the flow restrictor.

Claims

1. A flow verifier for verifying measurement of a flow rate of a fluid by a device, the flow verifier comprising:

a vessel configured to receive a flow of the fluid from the device;

an outlet valve configured to regulate flow of the fluid out of an outlet of the vessel;

a pressure sensor configured to measure pressure of the fluid within the vessel;

a temperature sensor configured to measure temperature of the fluid within the vessel;

a flow restrictor located along a flow path of the fluid from the device to the vessel, the flow restrictor adjacent to and upstream of the vessel; and

a controller configured to control the outlet valve, the controller further configured to verify the measurement of the flow rate of the fluid by the device, by measuring a rate of rise in the pressure of the fluid within the vessel during the time period after the closing of the outlet valve, and using the measured rate of rise to calculate the flow rate of the fluid from the device;

wherein the flow restrictor is configured to restrict the flow of the fluid along the flow path so as to induce a shock in the flow path, and is further configured to sustain the shock during a time period sufficient to render the flow rate verification substantially insensitive to an element upstream of the flow restrictor;

wherein the time period is given by;

t=(V/A_t)[(γ

+1)/c]−

(P_i/P_STP)(VT_STP/QT)

where t is the time period;

V is the volume of the vessel;

c is speed of sound just upstream of a shock front of the shock;

A_t is a cross sectional area of the flow restrictor;

γ

is a ratio of specific heats of the gas;

P_i is an initial pressure within the vessel in the beginning of the time period;

P_STP is standard pressure;

T_STP is standard temperature;

Q is a volumetric flow rate of the fluid into the vessel; and

T is temperature of the fluid within the vessel.

2. The flow verifier of claim 1, wherein the device comprises at least one of:

an MFC (mass flow controller); and

an MFM (mass flow meter).

3. The flow verifier of claim 1, wherein the element upstream of the flow restrictor comprises at least one of:

an external plumbing component;

an external volume; and

an orifice.

4. The flow verifier of claim 1,

wherein the flow restrictor is further configured to induce the shock by causing a bulk velocity of the fluid to become supersonic between the element upstream of the flow restrictor and the vessel, and to keep the bulk velocity of the fluid supersonic during the time period so that the flow rate of the fluid into the vessel remains substantially constant during the time period.

5. The flow verifier of claim 1,

wherein the flow restrictor is further configured to induce the shock in the flow path after the flow rate of the fluid into the vessel has reached a steady-state, and the outlet valve has been closed so that the pressure of the fluid begins to rise within the vessel.

6. The flow verifier of claim 1, wherein the flow restrictor comprises at least one of:

a capillary tube;

a porous plug;

an orifice;

an adjustable valve; and

a nozzle.

7. The flow verifier of claim 1, wherein the flow restrictor comprises an adjustable flow restrictor operable to adjust the restriction of the flow of the fluid based on one or more factors.

8. The flow verifier of claim 7, wherein the one or more factors comprise:

the flow rate of the fluid into the vessel;

a molecular weight of the fluid; and

a ratio of specific heats of the fluid.

9. The flow verifier of claim 1, wherein the controller is further configured to calculate the flow rate of the fluid from the device using a formula that comprises:

Q=(V/T)(T_STP/P_STP)(Δ

P/Δ

t)

where V is a volume of the vessel, T is the temperature of the fluid within the vessel, T_STP is standard temperature defined as 0°

C. and about 273.15 K, P_STP is standard pressure defined as 1 atm, and (Δ

P/Δ

t) is the rate of rise in the pressure of the fluid during the time interval.