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Method of pressure sensing with a pressure sensor having a sensor membrane and a compensation membrane

  • US 7,464,598 B2
  • Filed: 03/27/2008
  • Issued: 12/16/2008
  • Est. Priority Date: 10/18/2004
  • Status: Expired due to Fees
First Claim
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1. A method of sensing pressure with a pressure sensor having a sensor membrane and a compensation membrane, the pressure sensor also having a power supply, a controller;

  • and a charge amplifier, a charge injector and two switches arranged in signal communication with the controller, the method comprising;

    connecting the charge amplifier to the switches via a sensor capacitor Cs in parallel with a reference capacitor Cr in parallel with a parasitic capacitance Cp to ground, the charge injector and charge amplifier arranged in parallel connection between the capacitors and the controller; and

    operating the switches, via the controller, to determine a charge imbalance indicative of a pressure difference between the sensor and compensation membranes.

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