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Evaluating a geometric or material property of a multilayered structure

  • US 7,465,591 B2
  • Filed: 10/29/2004
  • Issued: 12/16/2008
  • Est. Priority Date: 03/08/2000
  • Status: Expired due to Fees
First Claim
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1. A method for evaluating a structure, the method comprising:

  • illuminating a region of the structure with a beam, the structure having a plurality of lines passing through said region;

    generating an electrical signal indicative of an attribute of a portion of the beam, the portion being reflected from said region;

    repeating the acts of “

    illuminating” and



    generating”

    in another region of the structure having another plurality of lines, thereby to obtain another electrical signal; and

    comparing said electrical signal with said another electrical signal to identify variation of a property in said region relative to said another region.

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