Field electrode trench transistor structure with voltage divider
First Claim
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1. A trench transistor comprising:
- trenches in a transistor array isolated from one another by a mesa region;
a field electrode arrangement, arranged in the trenches, having at least one field electrode which is spaced from the mesa region and the gate electrode by an insulation structure and which is electrically conductive;
a voltage divider having at least one voltage divider element and at least one subvoltage tap is formed in the same or another semiconductor body or in a wiring area, the voltage divider providing a subvoltage, situated between the potential of the source regions and the potential of the drain region, on the at least one subvoltage tap;
a respective field electrode is electrically connected to a respective subvoltage tap, andwherein the voltage divider elements are in the form of floating spaced apart semiconductor zones, extending to the surface of the semiconductor body, of the second conduction type in the semiconductor body, the semiconductor zones being electrically connected to a respective field electrode, arranged at increasing depth in the semiconductor body, via a subvoltage tap on the semiconductor zone with increasing spacing from the transistor array.
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Abstract
A trench transistor structure having a field electrode arrangement formed in trenches is disclosed. In one embodiment, the field electrode arrangement is conductively connected to subvoltage taps of a voltage divider for the purpose of stabilizing the potentials on a longer time scale than dynamic charge reversal processes.
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Citations
18 Claims
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1. A trench transistor comprising:
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trenches in a transistor array isolated from one another by a mesa region; a field electrode arrangement, arranged in the trenches, having at least one field electrode which is spaced from the mesa region and the gate electrode by an insulation structure and which is electrically conductive; a voltage divider having at least one voltage divider element and at least one subvoltage tap is formed in the same or another semiconductor body or in a wiring area, the voltage divider providing a subvoltage, situated between the potential of the source regions and the potential of the drain region, on the at least one subvoltage tap; a respective field electrode is electrically connected to a respective subvoltage tap, and wherein the voltage divider elements are in the form of floating spaced apart semiconductor zones, extending to the surface of the semiconductor body, of the second conduction type in the semiconductor body, the semiconductor zones being electrically connected to a respective field electrode, arranged at increasing depth in the semiconductor body, via a subvoltage tap on the semiconductor zone with increasing spacing from the transistor array. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A trench transistor comprising:
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a plurality of trenches in a transistor array extending into a semiconductor body from a surface and which are isolated from one another by a mesa region; a drift zone, formed in the mesa region for the purpose of picking up a reverse voltage, of a first conductivity type; a body region, formed above the drift zone, of a second conductivity type, which is the opposite of the first conductivity type, having source regions of the first conductivity type which adjoin the trenches; a drain region, formed below the drift zone, of the first conductivity type; a gate electrode, which is formed in the trenches and which is spaced from the mesa region by a gate insulation structure, for controlling the conductivity of channel regions which are formed between the source regions and the drift zone and which adjoin the trenches; a field electrode arrangement, arranged in the trenches, having at least one field electrode which is spaced from the mesa region and the gate electrode by an insulation structure and which is electrically conductive, wherein a voltage divider having at least one voltage divider element and at least one subvoltage tap is formed in the same or another semiconductor body or in a wiring area, the voltage divider providing a subvoltage, situated between the potential of the source regions and the potential of the drain region, on the at least one subvoltage tap; a respective field electrode is electrically connected to a respective subvoltage tap, configured to stabilize potentials on a longer time scale than a dynamic charge reversal process; and wherein the voltage divider elements are in the form of floating, spaced apart semiconductor zones, extending to the surface of the semiconductor body, of the second conduction type in the semiconductor body, the semiconductor zones being electrically connected to a respective field electrode, arranged at increasing depth in the semiconductor body, via a subvoltage tap on the semiconductor zone with increasing spacing from the transistor array. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17)
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18. A trench transistor structure comprising:
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trenches in a transistor array which extend into a semiconductor body from a surface and which are isolated from one another by a mesa region; a drift zone, formded in the mesa region for the purpose of picking up a reverse voltage, of a first conductivity type; a body region, formed above the drift zone, of a second conductivity type, which is the opposite of the first conductivity type, having source regions of the first conductivity type which adjoin the trenches; a drain region, formed below the drift zone, of the first conductivity type; a gate electrode, which is formed in the trenches and which is spaced from the mesa region by a gate insulation structure, for controlling the conductivity of channel regions which are formed between the source regions and the drift zone and which adjoin the trenches; a field electrode arrangement, arranged in the trenches having at least one field electrode which is spaced from the mesa region and the gate electrode by an insulation structure and which is electrically conductive, a voltage divider having at least one voltage divider element and at least one subvoltage tap in the same or another semiconductor body or in a wiring area, the voltage divider providing a subvoltage, situated between the potential of the source regions and the potential of the drain region, on the at least one subvoltage tap, and a respective field electrode being electrically connected to a respective subvoltage tap;
whereinthe voltage divider elements are in the form of floating, spaced apart semiconductor zones, extending to the surface of the semiconductor body, of the second conduction type in the semiconductor body, the semiconductor zones being electrically connected to a respective field electrode, arranged at increasing depth in the semiconductor body, via a subvoltage tap on the semiconductor zone with increasing spacing from the transistor array.
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Specification