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Rectangular semi-conducting support for microelectronics and method for making same

  • US 7,466,019 B2
  • Filed: 11/24/2005
  • Issued: 12/16/2008
  • Est. Priority Date: 11/30/2004
  • Status: Active Grant
First Claim
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1. A semi-conducting support for microelectronics, comprising:

  • a rectangular graphite substrate having a front surface and a rear surface;

    at least one semi-conducting layer arranged on the front surface of the substrate;

    at least a first stack arranged on the front surface of the substrate and successively comprising a single-crystal diamond layer, an electrically insulating oxide layer having a high dielectric constant and the semi-conducting layer; and

    a second stack arranged on the rear surface of the substrate, the second stack successively comprising a single-crystal diamond layer, an electrically insulating oxide layer having a high dielectric constant and a semi-conducting layer.

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