Rectangular semi-conducting support for microelectronics and method for making same

• US 7,466,019 B2
• Filed: 11/24/2005
• Issued: 12/16/2008
• Est. Priority Date: 11/30/2004
• Status: Active Grant

• Current Assignee: Commissariat a L'Energie Atomique (French Alternative Energies and Atomic Energy Commission)
• Original Assignee: Commissariat a L'Energie Atomique (French Alternative Energies and Atomic Energy Commission)
• Inventors: Deleonibus, Simon
• Primary Examiner(s): HO, TU TU V
• Application Number:
  US11/667,920
• Publication Number:
  US 20080001274A1
• Time in Patent Office: 1,118 Days
• Field of Search: 257/684, 257/E23.11
• US Class Current: 257/684
• CPC Class Codes: H01L 23/3732 Diamonds
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

The semi-conducting support comprises a graphite substrate having a front surface and a rear surface and at least a first stack arranged on the front surface of the substrate. The first stack successively comprises a single-crystal diamond layer, an electrically insulating oxide layer and a semi-conducting layer. The support can comprise a second stack arranged on the rear surface of the substrate and comprising the same succession of layers as the first stack or comprising a polymer material layer. A thermal connection passing through the first and/or second stacks and connecting the graphite substrate to an external surface of the support enables heat to be removed. The method can comprise production of the semi-conducting layer by molecular bonding of rectangular silicon strips onto the oxide layer.

Claims

1. A semi-conducting support for microelectronics, comprising:

a rectangular graphite substrate having a front surface and a rear surface;

at least one semi-conducting layer arranged on the front surface of the substrate;

at least a first stack arranged on the front surface of the substrate and successively comprising a single-crystal diamond layer, an electrically insulating oxide layer having a high dielectric constant and the semi-conducting layer; and

a second stack arranged on the rear surface of the substrate, the second stack successively comprising a single-crystal diamond layer, an electrically insulating oxide layer having a high dielectric constant and a semi-conducting layer.

6. The support according to claim 1, wherein the oxide layer comprises at least one compound selected among Al₂O₃, BaSrTiO₃, HfO₂, La₂O₃ and rare earth oxides.

7. The support according to claim 6, wherein the oxide layer is formed by an alternation of layers comprising any of Al₂O₃, HfO₂ and a rare earth oxide.

10. The support according to claim 1, further comprising a passivation layer arranged on the semi-conducting layer.

11. The support according to claim 1, wherein at least one of the electrically insulating oxide layers is thermally conducting.

2. A semi-conducting support for microelectronics, comprising:

a rectangular graphite substrate having a front surface and a rear surface;

at least one semi-conducting layer arranged on the front surface of the substrate;

at least a first stack arranged on the front surface of the substrate and successively comprising a single-crystal diamond layer, an electrically insulating oxide layer having a high dielectric constant and the semi-conducting layer; and

a second stack arranged on the rear surface of the substrate, the second stack comprising at least one polymer material layer.

12. A method for making a semi-conducting support according to claim 2, successively comprising:

producing the diamond layer;

depositing the oxide layer on the diamond layer;

producing the semi-conducting layer;

polishing the rear surface of the support; and

depositing a polymer material layer on the rear surface of the support.

13. The support according to claim 2, wherein the oxide layer comprises at least one compound selected among Al₂O₃, BaSrTiO₃, HfO₂, La₂O₃ and rare earth oxides.

14. The support according to claim 13, wherein the oxide layer is formed by an alternation of layers comprising any of Al₂O₃, HfO₂ and a rare earth oxide.

15. The support according to claim 2, further comprising a passivation layer arranged on the semi-conducting layer.

16. The support according to claim 2, wherein at least one of the electrically insulating oxide layers is thermally conducting.

3. A semi-conducting support for microelectronics, comprising:

a rectangular graphite substrate having a front surface and a rear surface;

at least one semi-conducting layer arranged on the front surface of the substrate;

at least a first stack arranged on the front surface of the substrate and successively comprising a single-crystal diamond layer, an electrically insulating oxide layer having a high dielectric constant and the semi-conducting layer;

a second stack arranged on the rear surface of the substrate, the second stack successively comprising a single-crystal diamond layer, an electrically insulating oxide layer having a high dielectric constant and a semi-conducting layer; and

at least one electrical connection passing through the substrate and connecting the semi-conducting layer of the first stack to the second stack.

17. The support according to claim 3, wherein the oxide layer comprises at least one compound selected among Al₂O₃, BaSrTiO₃, HfO₂, La₂O₃ and rare earth oxides.

18. The support according to claim 17, wherein the oxide layer is formed by an alternation of layers comprising any of Al₂O₃, HfO₂ and a rare earth oxide.

19. The support according to claim 3, further comprising a passivation layer arranged on the semi-conducting layer.

20. The support according to claim 3, wherein at least one of the electrically insulating oxide layers is thermally conducting.

4. A semi-conducting support for microelectronics, comprising:

a rectangular graphite substrate having a front surface and a rear surface;

at least one semi-conducting layer arranged on the front surface of the substrate;

at least a first stack arranged on the front surface of the substrate and successively comprising a single-crystal diamond layer, an electrically insulating oxide layer having a high dielectric constant and the semi-conducting layer;

a second stack arranged on the rear surface of the substrate, the second stack successively comprising a single-crystal diamond layer, an electrically insulating oxide layer having a high dielectric constant and a semi-conducting layer; and

an additional insulating layer disposed between the substrate and at least one of the first and second stacks.

21. The support according to claim 4, wherein the oxide layer comprises at least one compound selected among Al₂O₃, BaSrTiO₃, HfO₂, La₂O₃ and rare earth oxides.

22. The support according to claim 21, wherein the oxide layer is formed by an alternation of layers comprising any of Al₂O₃, HfO₂ and a rare earth oxide.

23. The support according to claim 4, further comprising a passivation layer arranged on the semi-conducting layer.

24. The support according to claim 4, wherein at least one of the electrically insulating oxide layers is thermally conducting.

5. A semi-conducting support for microelectronics, comprising:

a rectangular graphite substrate having a front surface and a rear surface;

at least one semi-conducting layer arranged on the front surface of the substrate;

at least a first stack arranged on the front surface of the substrate and successively comprising a single-crystal diamond layer, an electrically insulating oxide layer having a high dielectric constant and the semi-conducting layer;

a second stack arranged on the rear surface of the substrate, the second stack successively comprising a single-crystal diamond layer, an electrically insulating oxide layer having a high dielectric constant and a semi-conducting layer; and

an additional metallic layer disposed between the substrate and at least one of the first and second stacks.

25. The support according to claim 5, wherein the oxide layer comprises at least one compound selected among Al₂O₃, BaSrTiO₃, HfO₂, La₂O₃ and rare earth oxides.

26. The support according to claim 25, wherein the oxide layer is formed by an alternation of layers comprising any of Al₂O₃, HfO₂ and a rare earth oxide.

27. The support according to claim 5, further comprising a passivation layer arranged on the semi-conducting layer.

28. The support according to claim 5, wherein at least one of the electrically insulating oxide layers is thermally conducting.

8. A semi-conducting support for microelectronics, comprising:

a rectangular graphite substrate having a front surface and a rear surface;

at least one semi-conducting layer arranged on the front surface of the substrate;

at least a first stack arranged on the front surface of the substrate and successively comprising a single-crystal diamond layer, an electrically insulating oxide layer having a high dielectric constant and the semi-conducting layer;

a second stack arranged on the rear surface of the substrate, the second stack successively comprising a single-crystal diamond layer, an electrically insulating oxide layer having a high dielectric constant and a semi-conducting layer; and

at least one thermal connection passing through at least one of the first and second stacks and connecting the graphite substrate to an external surface of the support.

9. The support according to claim 8, further comprising at least one heat sink arranged on the external surface of the support and connected to the thermal connection.

29. The support according to claim 8, further comprising a passivation layer arranged on the semi-conducting layer.

30. The support according to claim 8, wherein at least one of the electrically insulating oxide layers is thermally conducting.