Compensation for thermal siphoning in mass flow controllers

• US 7,467,027 B2
• Filed: 01/26/2006
• Issued: 12/16/2008
• Est. Priority Date: 01/26/2006
• Status: Active Grant

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Ding, Junhua, Zarkar, Kaveh H., L'Bassi, Michael
• Primary Examiner(s): Decady; Albert
• Assistant Examiner(s): Lee; Douglas S
• Application Number:
  US11/340,260
• Publication Number:
  US 20070174016A1
• Time in Patent Office: 1,055 Days
• Field of Search: 700/282, 702/45, 702/47, 702/50, 702/100, 732/02, 732/025
• US Class Current: 700/282
• CPC Class Codes: G05D 7/0635 by action on throttling means G05D7/0688, G05D7/0694 take precedence

Abstract

A thermal mass flow controller for controlling flow rate of a fluid includes a conduit configured to receive the fluid, a pressure sensor that measures the pressure of the fluid as the fluid flows within the conduit, a temperature sensor that measures the ambient temperature of the fluid, and a thermal sensor that generates an output representative of the flow rate of the fluid. The thermal mass flow controller further includes a control system configured to monitor the output from the thermal sensor, the pressure measured by the pressure sensor, and the ambient temperature measured by the temperature sensor, to regulate flow of the fluid within the conduit so as to compensate for a shift in the thermal sensor output caused by thermal siphoning.

Claims

1. A thermal mass flow controller for controlling flow rate of a fluid, the thermal mass flow controller comprising:

a conduit configured to receive the fluid;

a pressure sensor configured to measure pressure of the fluid, as the fluid flows within the conduit;

a temperature sensor configured to measure ambient temperature of the fluid;

a thermal sensor configured to generate an output representative of the flow rate of the fluid, the output comprising a voltage output; and

a control system configured to monitor the output from the thermal sensor, the pressure measured by the pressure sensor, and the ambient temperature measured by the temperature sensor, to regulate flow of the fluid within the conduit so as to compensate for a shift in the thermal sensor output caused by thermal siphoning.

wherein the thermal sensor, when heated, is configured to generate a temperature differential as the fluid flows within the heated sensor, and includes a temperature measurement system configured to measure the temperature differential, and a thermal sensor tube having a tubular configuration; and

wherein the thermal sensor is configured to convert the measured temperature differential into the voltage output;

wherein the control system is configured to calibrate the termal sensor with a zero flow voltage V_ze that represents the voltage output at a zero fluid flow, and a full scale flow voltage V_fs that represents the voltage output at a full scale fluid flow;

wherein V_ze and V_fs are known empirical functions of the pressure measured by the pressure sensor and the temperature measured by the temperature sensor; and

wherein V_ze and V_fs further comprise known empirical functions of a Grashof number G_r that depends on the measured pressure and temperature; and

wherein the Grashof number G_r is given by;

G_r=g.α

.(T−

T_a).d³.M².P²/(μ

³.R².T²),

where g is a gravitational constant;

α

is a thermal expansion coefficient of the fluid;

T_a is the temperature measured by the temperature sensor;

T is a temperature of the fluid and depends on T_a;

d is a diameter of the thermal sensor tube;

M is a mass of the fluid;

P is the pressure measured by the pressure sensor;

μ

is a viscosity of the fluid; and

R is a universal gas law constant.

2. The thermal mass flow controller of claim 1,

wherein V_ze and V_fs further depend on an orientation of the thermal sensor tube with respect to the primary flow path.

3. The thermal mass flow controller of claim 2,

wherein the orientation of the thermal sensor tube is representable by a parameter Pos;

and

wherein V_ze and V_fs are representable by known empirical functions f_ze(P, T_a, α

, μ

, M, Pos) and f_fs(P, T_a, α

, μ

, M, Pos), respectively.

4. The thermal mass flow controller of claim 3,

wherein the control system is further configured to calibrate the thermal sensor output at a calibration pressure P₀, a calibration ambient temperature T₀, and a calibration orientation Pos₀, by computing and storing a plurality of calibration values V_ze0, . . . V₀, . . . V_fs0 of the output voltage, at corresponding flow rates 0, . . . , Q₀, . . . , and Q_fs0;

and

wherein the control system is further configured to compensate for the shift in the thermal sensor output caused by thermal siphoning based on the plurality of stored calibration values.

5. The thermal mass flow controller of claim 4, wherein the control system is further configured to perform an interpolation to compensate for the shift caused by thermal siphoning.

6. The thermal mass flow controller of claim 5, wherein the interpolation comprises at least one of linear interpolation and non-linear interpolation.

7. The thermal mass flow controller of claim 4,

wherein the control system is further configured to calculate a zero flow voltage V_ze1 and the full scale voltage V_fs1 using the known empirical functions f_ze(P, T_a, α

, μ

, M, Pos) and f_fs(P, T_a, α

, μ

, M, Pos), at measured values P₁, T₁, and V₁ of the pressure, temperature, and output voltage respectively, to calculate a thermal sensor voltage output V_1′

that has been compensated for thermal siphoning; and

wherein the control system is further configured to determined a flow rate for which thermal siphoning has been compensated for, by searching the plurality of stored calibration values to find a corresponding flow rate based on the calculated V_1′

.

8. The thermal mass flow controller of claim 7,

wherein the control system is configured to compensate for the shift caused by thermal siphoning by performing linear interpolation;

and

wherein the control system is configured to calculate V_1′

in terms of V_ze1, V_fs1, using the following equation;

$V_1^{\mathrm{\prime <br><br>}}=\frac{V_1-V_{\mathrm{ze}<br><br><br><br>1}}{V_{\mathrm{fs}<br><br><br><br>1}-V_{\mathrm{ze}<br><br><br><br>1}}<br><br>\left(V_{\mathrm{fs}<br><br><br><br>0}-V_{\mathrm{ze}<br><br><br><br>0}\right)+V_{\mathrm{ze}<br><br><br><br>0}.$

9. The thermal mass flow controller of claim 1, wherein the pressure sensor is located upstream, compared to the temperature sensor.

10. The thermal mass flow controller of claim 1, wherein the pressure sensor is located downstream, compared to the temperature sensor.

11. The thermal mass flow controller of claim 1, further comprising a bypass within the conduit, the bypass configured to restrict a flow of fluid entering the inlet of the conduit so as divert a portion of the fluid onto an input end of the thermal sensor.

12. The thermal mass flow controller of claim 11, wherein the bypass comprises a pressure dropping bypass configured to generate a pressure differential across the thermal sensor.

13. The thermal mass flow controller of claim 1, wherein the temperature measurement system comprises:

a pair of thermally sensitive resistive elements, each of the elements having a resistance that varies as a function of temperature of the element; and

a measuring circuit configured to determine the temperature of each of the elements by measuring the resistance of each element.

14. The thermal mass flow controller of claim 1, further comprising a heater configured to heat at least a portion of the thermal sensor.

15. The thermal mass flow controller of claim 14, wherein the heater comprises a pair of heating coils configured to resistively heat a thermal sensing portion of the sensor when an electric current is supplied thereto.

16. A method of compensating for thermal siphoning in a thermal mass flow controller for controlling flow rate of a fluid, the thermal mass flow controller including a conduit configured to allow flow of the fluid between an inlet and an outlet of the conduit, and a thermal sensor configured to generate an output representative of the flow rate of the fluid, the method comprising:

monitoring measurements of a pressure of the fluid and an ambient temperature of the fluid;

detecting a shift in the output of the thermal sensor caused by thermal siphoning; and

regulating flow of the fluid into the inlet of the conduit and out of the outlet of the conduit, so as to compensate for the detected shift, the act of regulating flow of the fluid including;

calibrating the thermal sensor with a zero flow voltage V_ze that represents the voltage output at a zero fluid flow, and a full scale flow voltage V_fs that represents the voltage output at a full scale fluid flow, where V_ze and V_fs are known functions of the pressure and temperature measurements, the thermal sensor output being calibrated at a calibration pressure P_0, a calibration ambient temperature T_0, and a calibration orientation Pos₀, by computing and storing a plurality of calibration values V_ze0, . . . V₀, . . . V_fs0 of the output voltage, at corresponding flow rates 0, . . . , Q₀, . . . , and Q_fs0, and compensating for the shift in the thermal sensor output caused by thermal siphoning, based on the plurality of stored calibration values, wherein a zero flow voltage V_ze1 and the full scale voltage V_fs1 are calculated using the known empirical functions f_ze(P, T_a, α

, μ

, M, Pos) and f_fs(P, T_a, α

, μ

, M, Pos), at measured values P₁, T₁, and V₁ of the pressure, temperature, and sensor output voltage respectively, to calculate a thermal sensor voltage output V_1′

that has been compensated for thermal siphoning; and

determining a flow rate for which thermal siphoning has been compensated for, by searching the plurality of stored calibration values to find a corresponding flow rate based on the calculated V_1′

.