Microfluidic modulating valve
First Claim
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1. A valve, comprising:
- a housing that defines a cavity;
an inlet port in fluid communication with the cavity;
an outlet port spaced from the inlet port and in fluid communication with the cavity;
a diaphragm positioned in the cavity between the inlet port and the outlet port, wherein the diaphragm has an upstream edge positioned toward the inlet port and a downstream edge positioned toward the outlet port, wherein a fluid path extends from the inlet port, past the upstream edge of the diaphragm, past the downstream edge of the diaphragm, and to the outlet port, the fluid path having a cross-sectional area; and
at least three electrodes for use in electrostatically actuating at least part of the diaphragm between at least three stable positions, wherein each stable position results in a different cross-sectional area of the fluid path, and wherein the different cross-sectional areas are sized such that fluid can flow along the fluid path between the inlet port and the outlet port in at least two of the stable positions wherein at least two of the at least three electrodes are independently controllable.
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Abstract
A valve is provided that can selectively change the size of a flow channel in a valve in order to modulate the fluid flow through the valve. In one illustrative embodiment, the valve includes a housing that defines a cavity, with an inlet and an outlet extending into the cavity. A diaphragm is positioned in the cavity, where at least part of the diaphragm defines at least part of the fluid path. One or more electrodes are fixed relative to the diaphragm, and one or more electrodes are fixed relative to the housing such that the diaphragm can be electrostatically actuated to modulate the fluid flow through the valve.
157 Citations
20 Claims
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1. A valve, comprising:
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a housing that defines a cavity; an inlet port in fluid communication with the cavity; an outlet port spaced from the inlet port and in fluid communication with the cavity; a diaphragm positioned in the cavity between the inlet port and the outlet port, wherein the diaphragm has an upstream edge positioned toward the inlet port and a downstream edge positioned toward the outlet port, wherein a fluid path extends from the inlet port, past the upstream edge of the diaphragm, past the downstream edge of the diaphragm, and to the outlet port, the fluid path having a cross-sectional area; and at least three electrodes for use in electrostatically actuating at least part of the diaphragm between at least three stable positions, wherein each stable position results in a different cross-sectional area of the fluid path, and wherein the different cross-sectional areas are sized such that fluid can flow along the fluid path between the inlet port and the outlet port in at least two of the stable positions wherein at least two of the at least three electrodes are independently controllable. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A valve, comprising:
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a housing that defines a cavity; an inlet port in fluid communication with the cavity; an outlet port spaced from the inlet port and in fluid communication with the cavity; a diaphragm positioned in the cavity between the inlet port and the outlet port, wherein the diaphragm has an upstream edge positioned toward the inlet port and a downstream edge positioned toward the outlet port, wherein a fluid path extends from the inlet port, past the upstream edge of the diaphragm, past the downstream edge of the diaphragm, and to the outlet port, the fluid path having a cross-sectional area; at least three electrodes for use in electrostatically actuating at least part of the diaphragm between at least three stable positions, wherein each stable position results in a different cross-sectional area of the fluid path, and wherein the different cross-sectional areas are sized such that fluid can flow along the fluid path between the inlet port and the outlet port in at least two of the stable positions; wherein at least two of the three or more electrodes are elongated and extend lengthwise along the fluid path, and are spaced side-by-side from one another in a direction that is perpendicular or substantially perpendicular to the fluid path; and wherein at least two of the at least three electrodes are independently controllable. - View Dependent Claims (16, 17)
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18. A valve, comprising:
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a housing that defines a cavity; an inlet port in fluid communication with the cavity; an outlet port in fluid communication with the cavity; a fluid path within the cavity that extends between the inlet port and the outlet port, the fluid path having a cross-sectional area; a diaphragm positioned in the cavity, at least part of the diaphragm defining at least part of the fluid path; at least three electrodes for use in electrostatically actuating at least part of the diaphragm between at least three stable positions; wherein in a first stable position, the diaphragm is in a generally planar first position; wherein in a second stable position, a first part of the diaphragm remains in the generally planar first position, and a second part of the diaphragm is moved from the generally planar first position to another position; wherein in a third stable position, a third part of the diaphragm is moved from the generally planar first position to another position; wherein each stable position results in a different cross-sectional area of the fluid path, and wherein the different cross-sectional areas are sized such that fluid can flow between the inlet port and the outlet port in at least two of the stable positions wherein at least two of the at least three electrodes are independently controllable. - View Dependent Claims (19, 20)
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Specification