Device for conditioning recirculating air, especially clean room air
First Claim
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1. A device for conditioning recirculating clean room air, the device comprising:
- at least one filter fan unit mounted on a ceiling of a room and arranged in a common plenum above the ceiling, wherein the at least one filter fan unit comprises a housing, a fan and a filter, wherein the fan and the filter are arranged inside the housing;
at least one return air conduit through which a first portion of recirculating clean room air is supplied from a bottom area of the room to the common plenum and from the common plenum is sucked in by the fan into the at least one filter fan unit;
wherein the fan has at least one intake that opens into the room at the ceiling;
wherein a second portion of the recirculating clean room air bypasses the at least one return air conduit and is directly supplied to the fan through the at least one intake;
wherein the at least one intake is an intake line connected to the housing of the at least one filter fan unit or the at least one intake is integrated into the housing of the at least one filter fan unit.
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Abstract
A device for conditioning recirculating air in a cleanroom has at least one fan having a housing. A return air conduit is provided through which a first portion of recirculating air is supplied from the cleanroom to the at least one fan. A second portion of the recirculating air is directly supplied to the at least one fan by bypassing the at least one return air conduit.
42 Citations
44 Claims
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1. A device for conditioning recirculating clean room air, the device comprising:
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at least one filter fan unit mounted on a ceiling of a room and arranged in a common plenum above the ceiling, wherein the at least one filter fan unit comprises a housing, a fan and a filter, wherein the fan and the filter are arranged inside the housing; at least one return air conduit through which a first portion of recirculating clean room air is supplied from a bottom area of the room to the common plenum and from the common plenum is sucked in by the fan into the at least one filter fan unit; wherein the fan has at least one intake that opens into the room at the ceiling; wherein a second portion of the recirculating clean room air bypasses the at least one return air conduit and is directly supplied to the fan through the at least one intake; wherein the at least one intake is an intake line connected to the housing of the at least one filter fan unit or the at least one intake is integrated into the housing of the at least one filter fan unit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43)
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44. A filter-fan unit comprising:
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a housing; a fan arranged in the housing, wherein the fan has an intake area that takes in a first portion of return air from a plenum of a clean room, in which plenum the filter fan unit is arranged; a filter arranged in the housing; at least one intake for recirculating a second portion of return air, wherein the at least one intake is connected to a ceiling of the clean room, wherein the least one intake is integrated into the housing.
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Specification