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Method of depositing heater material over a photoresist scaffold

  • US 7,468,139 B2
  • Filed: 02/18/2005
  • Issued: 12/23/2008
  • Est. Priority Date: 07/15/1997
  • Status: Expired due to Fees
First Claim
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1. A method of forming an inkjet printhead with a suspended heater element, the method comprising at least the steps of:

  • depositing a layer of photoresist on a substrate;

    masking the layer of photoresist with a mask that is opaque to light of a predetermined wavelength;

    focusing a source of light at the predetermined wavelength on to the mask and the layer of photoresist to cure portions of the layer of photoresist;

    etching away uncured photoresist from the layer of photo resist to form a sacrificial photoresist scaffold having sloped side faces; and

    ,depositing heater material over the sacrificial photoresist scaffold;

    wherein,the sloped side faces are formed using a predetermined focusing condition employed by the source of light during exposure of the layer of photoresist.

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