Spot grid array scanning system

• US 7,468,506 B2
• Filed: 01/19/2006
• Issued: 12/23/2008
• Est. Priority Date: 01/26/2005
• Status: Expired due to Fees

• Current Assignee: Applied Materials Israel Limited (Applied Materials Incorporated), Carl Zeiss AG (Carl-Zeiss-Stiftung)
• Original Assignee: Applied Materials Israel Limited (Applied Materials Incorporated)
• Inventors: Naftali, Ron, Elyasef, Emanuel, Elmaliach, Nissim, Rogers, Steven R., Litman, Alon
• Primary Examiner(s): Sohn; Seung C.
• Application Number:
  US11/334,963
• Publication Number:
  US 20060261261A1
• Time in Patent Office: 1,069 Days
• Field of Search: 250/234, 250/235, 250/559.16, 250/559.22, 356/601
• US Class Current: 250/234
• CPC Class Codes: G01N 21/8851 Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges G01N21/8806 and G01N21/93 - G01N21/95692 take precedence; optical measurement of dimensions G01B11/00; optical scanning G02B26/10; image transformation G06T3/00; computerised image enhancement G06T5/00; image processing per se for flaw detection G06T7/0002
• CPC Class Codes: G01N 21/9501 Semiconductor wafers manufacturing processes per se of semiconductor devices implementing a measuring step H01L22/10
• CPC Class Codes: G03F 7/70275 Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
• CPC Class Codes: G03F 7/70358 Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging

Abstract

A method for scanning a surface, consisting of focusing an array of beams using optics having an axis, so as to irradiate a region of the surface intercepted by the axis, such that each beam irradiates a portion of a respective sub-region within the region. The method further includes moving at least one of the array and the surface so as to cause a translation of the surface relative to the axis in a first direction. During the translation in the first direction, each of the beams is scanned over the respective sub-region in a second direction, which is different from the first direction.

Claims

1. An apparatus for scanning a surface, comprising:

a beam generator which generates an array of beams;

beam optics having an optical axis, which are adapted to focus the array of beams so as to irradiate a region of the surface intercepted by the optical axis, wherein each beam irradiates a portion of a respective sub-region within the region;

a surface translator for moving at least one of the array and the surface so as to cause a surface velocity relative to the optical axis in a first direction; and

an array scanner, which, during said moving, is adapted to scan each of the beams over the respective sub-region in a second direction, which is different from the first direction, said scanning defining an array of raster patterns, each raster pattern covering a respective sub-region and comprising rows that are perpendicular to said first direction; and

said scanning comprising;

scanning a predetermined number of said rows, and then jumping in a direction substantially opposite to the first direction, so as to repeat said raster pattern over a new region of the surface.

2. The apparatus according to claim 1, wherein the array of raster patterns completely covers the region.

3. The apparatus according to claim 1, wherein the surface comprises dies, and wherein the beam optics have a magnification which is adjusted to maintain a die periodicity.

4. The apparatus according to claim 1, wherein the surface comprises dies, and wherein the jump in the first direction comprises a first and a second jump, and comprising a processor which adjusts a size and a number of the first jump and the size and the number of the second jump so as to maintain a die periodicity.

5. The apparatus according to claim 1, wherein the array of raster patterns partially covers the region.

6. The apparatus according to claim 5, wherein the array scanner is adapted to iteratively repeat the steps of scanning the beams and jumping in the first direction so that the array of raster patterns completely covers the region.

7. The apparatus according to claim 1, wherein the surface translator is adapted to move the surface with a predetermined velocity, and wherein the array scanner is adapted to move the array with an array velocity having a component including the predetermined velocity.

8. The apparatus according to claim 1, wherein the array of beams defines a beam array axis within the region, and wherein said beam array axis and the first direction are independent of each other.

9. The apparatus according to claim 1, wherein the second direction is perpendicular to the first direction.

10. The apparatus according to claim 1, wherein the beam optics define an aberration-corrected region for the beams, and wherein the array scanner and the surface translator are adapted to maintain the region of the surface within the aberration-corrected region.

13. The method according to claim 1,1 wherein the surface comprises dies, and said method further comprising adjusting a magnification of the optics to maintain a die periodicity.

11. A method for scanning a surface, comprising:

focusing an array of beams using optics having an optical axis, so as to irradiate a region of the surface intercepted by the optical axis, wherein each beam irradiates a portion of a respective sub-region within the region;

moving at least one of the array and the surface so as to cause a surface velocity relative to the optical axis in a first direction; and

during said moving, scanning the array of beams over the region in a second direction, which is different from the first direction, said scanning defining an array of raster patterns, each said raster pattern covering a respective sub-region and comprising rows that are perpendicular to said first direction and said scanning comprising;

scanning a predetermined number of said rows, and then jumping in a direction substantially opposite to the first direction, so as to repeat said raster pattern over a new region of the surface.

12. The method according to claim 11, wherein the array of raster patterns completely covers the region.

14. The method according to claim claim 11 wherein the surface comprises dies, and wherein jumping in the first direction comprises performing a first jump and a second jump, and adjusting a size and a number of the first jump and a size and a number of the second jump so as to maintain a die periodicity.

15. The method according to claim 11 wherein the array of raster patterns partially covers the region.

16. The method according to claim 15, said method further comprising iteratively repeating the steps of scanning the beams and jumping in the first direction so that the array of raster patterns completely covers the region.

17. The method according to claim 11, wherein moving the at least one of the array and the surface comprises moving the surface with a predetermined velocity, and moving the array with an array velocity having a component including the predetermined velocity.

18. The method according to claim 11, wherein the array of beams defines a beam array axis within the region, and wherein said beam array axis and the first direction are independent of each other.

19. The method according to claim 11, wherein the second direction is perpendicular to the first direction.

20. The method according to claim 11, wherein the optics define an aberration-corrected region for the beams, and wherein moving the at least one of the array and the surface comprises maintaining the region of the surface within the aberration-corrected region.