Electrostatically driven latchable actuator system

• US 7,468,571 B2
• Filed: 08/25/2004
• Issued: 12/23/2008
• Est. Priority Date: 08/26/2003
• Status: Expired due to Fees

• Current Assignee: Panasonic Electric Works Company Limited (Panasonic Holdings Corporation)
• Original Assignee: Asahi Matsushita Electric Works Ltd. (Panasonic Holdings Corporation)
• Inventors: Suzuki, Yuji, Harada, Hiroshi, Fukshima, Hiroshi, Kawano, Kiyohiko, Noge, Hiroshi, Ogihara, Jun, Oka, Naomasa
• Primary Examiner(s): Tamai; Karl I
• Application Number:
  US10/569,101
• Publication Number:
  US 20060261702A1
• Time in Patent Office: 1,581 Days
• Field of Search: 310/309, 385/16, 385/18, 385/20, 385/22, 385/49, 359/223, 359/224, 359/290, 359/291, 359/872
• US Class Current: 310/309
• CPC Class Codes: G02B 26/02 for controlling the intensity of light G02B26/004 takes precedence
• CPC Class Codes: G02B 6/3512 the optical element being reflective, e.g. mirror
• CPC Class Codes: G02B 6/355 1x2 switch, i.e. one input and a selectable single output of two possible outputs
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/358 Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C
• CPC Class Codes: G02B 6/3596 With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate
• CPC Class Codes: H01H 2001/0047 operable only by mechanical latching
• CPC Class Codes: H01H 59/0009 making use of micromechanics

Abstract

An electrostatically driven latchable actuator system has an actuator and a pair of side effectors on opposite ends of the actuator. The actuator is resiliently supported to a substrate and is movable along a linear axis between two operative positions as being electrically attracted to one of the side effectors. A latch mechanism is provided to mechanically latch the actuator at either of the operative positions. The side effectors are movably towards and away from the actuator along the linear axis between a normal position and a shifted position close to the actuator. Both of the side effectors are also resiliently supported to the substrate to be movable towards the actuator by being electrostatically attracted thereto and away from the actuator by resiliency. The moving side effector is interlocked to the latch mechanism through a mechanical link so as to unlatch the actuator in response to one of the side effectors being attracted to the actuator, and allow the actuator to move from one operative position to the other operative position to be again latched thereat.

Claims

1. An electrostatically driven latchable actuator system comprising:

a substrate;

an actuator carried on said substrate to be movable along a linear axis between two operative positions past a neutral position, said actuator being adapted to be connected to an object for shifting the object, said actuator being formed on its opposite ends respectively with center electrodes with respect to said linear axis, and being resiliently supported to said substrate to be given a spring bias by which said actuator is biased towards said neutral position;

first and second side effectors carried on said substrate and disposed respectively on opposite ends of said actuator with respect to said linear axis;

said side effectors being formed respectively with side electrodes that are held in electrostatically coupling relation with said center electrodes;

driving means which develops an electrostatically attracting force between said center electrode and said side electrodes for driving said actuator into either one of said two operating position;

latch means which latches said actuator in one of said operative position against said spring bias when said actuator is moved to said one position, and

unlatch means which unlatches said actuator to allow it to move out of said one operative position towards the other operative position,

wherein said side effectors are movable towards and away from said actuator along said linear axis between a normal position and a shifted position close to said actuator,

said unlatch means is interlocked with the movement of said side effectors in order to unlatch said actuator as one of said side effectors moves to it shifted position, thereby allowing said actuator to move out of one of said operative position and allowing it to move to the other operative position by the electrostatically attracting force developed between said one side effector and said actuator.

2. The system as set forth in claim 1, wherein said latch means comprises:

catches formed respectively at opposite ends of said actuator, and

latch members formed on said substrate respectively adjacent to said side effectors,

each of said latch members having a detent engageable with the associated catch,

each of said catches assuming two conditions in response to the movement of the actuator, one being a latch-enabled condition where said catch is engageable with said detent for latching said actuator, and the other being a latch-disabled condition where said catch is kept free from engageable with said detent, one of said catches being in said latch-disabled position when the other catch is in said latch-enabled position,

each one of said catches, in response to the movement of said actuator, coming into said latch-enabled position from said latch-enabled position so as to be held in latching engagement with the associated detent,

said unlatch means including release links each mechanically coupling each one of said side effectors to each associated one of said latch members, each of said release links forces each corresponding one of said latch members to move for releasing the engagement of said detent with said catch, in response to said associated one of said side effectors moving to said shifted position, thereby unlatching said actuator.

3. The system as set forth in claim 2, wherein

said release link comprises one or more springs formed on said substrate.

4. The system as set forth in claim 2, wherein

said latch members are electrically isolated respectively from said side electrodes.

5. The system as set forth in claim 2, wherein

said latch member is resiliently supported to said substrate to be movable between a latching position of engaging said detent with the associated catch in said latch-enabled condition, and a releasing position of releasing said detents from said catch in said latch-enabled condition.

6. The system as set forth in claim 5, wherein

both of said catches are held in said latch-disabled condition when said actuator is in said neutral position,

said release link, in response to the movement of the associated one of said side effectors to its shifted position, forcing said latch member into said release position and allowing the associated one of said catches that has been held in said latch-enabled condition to move into said latch-disabled condition, thereby unlatching said actuator and permitting it to move out from one of said operative position,

each one of said catches being engageable with the associated one of said latch members to force it to move from said latching position to the releasing position as said actuator moves in a direction of being unlatched at the other catch, allowing said one catch to move from said latch-disabled condition to said latch-enabled condition such that said latch member resiliently returns thereafter to the latching position for making the latching engagement with said one catch.

7. The system as set forth in claim 1, wherein

said driving means is configured to apply a voltage difference between the side electrode of one of said side effectors and said center electrodes for electrostatically attracting said actuator to said one side effector to move said actuator from said neutral position into one of said operative positions.

8. The system as set forth in claim 1, wherein

said driving means configured to apply a voltage difference between said side electrodes of one of said side effectors and said center electrodes for electrostatically attracting said actuator to said one side effector towards to move said actuator into one of said operative positions from the other operative position.

9. The system as set forth in claim 1, wherein

said driving means configured to apply a voltage difference between said side electrodes of said both side effectors and said center electrodes for moving said actuator into said neutral position from anyone of said operative positions.

10. The system as set forth in claim 1, wherein

said latch means includes retainer means which holds said actuator around said neutral position in the absence of said electrostatically attracting force between said actuator and any one of said side effectors.

11. The system as set forth in claim 1, wherein said latch means comprises:

at least one latch member resiliently supported to said substrate in an adjacent relation to each of said side effectors, said latch member being fixed at its one end to said substrate and being formed at the other free end with a detent;

a socket formed at each opposite end of said actuator for releasably receiving said detent, said socket being provided at its open end with a catch engageable with said detent,

one of said catches abutting against said detent outside of said socket to latch said actuator when said actuator is in either one of said operative positions,

one of said catches engaging with said detent inside of said socket to resilient deform said latch member for allowing said detent to escape outwardly of said socket as said actuator moves by being electrostatically attracted to one of said side effectors, thereby enabling said latch member to resiliently return for engagement with said catch outside of said socket,

said unlatch means comprising a release lever formed at each of said side effectors to be movable together therewith, said release lever being engageable with said least one latch member to resiliently deform it for releasing said detent from said catch and for allowing said dent to advance into said socket as one of said side effectors moves towards said actuator by the electrostatically attracting force.

12. The system as set forth in claim 11, wherein each of said socket is provided in its Interior with a retainer projection spaced inwardly from said catch along said linear axis, said retainer projection being held close to said detent when said actuator is in said neutral position, retaining said actuator around its neutral position in the absence of said electrostatically attracting force between said actuator and any one of said side effectors.

13. An optical switch comprising:

an input optical guide adapted to receive a light signal;

two output optical guides each adapted to output said light signal; and

an actuator system having an actuator carrying a mirror for reflecting the light signal incoming through said input optical guide to one of said output guides,

said actuator system comprising;

a substrate;

an actuator carried on said substrate to be movable along a linear axis between two operative positions past a neutral position, said actuator being connected to said mirror, said actuator being formed on its opposite ends respectively with center electrodes with respect to said linear axis, and being resiliently supported to said substrate to be given a spring bias by which said actuator is biased towards said neutral position;

first and second side effectors carried on said substrate and disposed respectively on opposite ends of said actuator with respect to said linear axis;

said side effectors being formed respectively with side electrodes that are held in electrostatically coupling relation with said center electrodes;

driving means which develops an electrostatically attracting force between said center electrode and said side electrodes for driving said actuator into either one of said two operating position;

latch means which latches said actuator in one of said operative position against said spring bias when said actuator is moved to said one position, and

unlatch means which unlatches said actuator to allow said actuator to move out of said one operative position towards the other operative position,

wherein said side effectors are movable towards and away from said actuator along said linear axis between a normal position and a shifted position close to said actuator,

said unlatch means is interlocked with the movement of said side effectors in order to unlatch said actuator as one of said side effectors moves to it shifted position, thereby allowing said actuator to move out of one of said operative position and allowing it to move to the other operative position by the electrostatically force developed between said one side effector and said actuator.