Detecting gaseous species by light-emission spectrometry with spectrum processing
First Claim
1. A method of detecting gaseous species in a mixture by light-emission spectroscopy, in which use is made of the radiation emitted by a plasma present in the gas mixture under analysis, a measurement system is used to take a raw optical spectrum of said radiation emitted by the plasma, and the raw optical spectrum is compared with a library of reference optical spectra, the method comprising:
- generating a pruned optical spectrum, including making use, in the raw optical spectrum, of only those zones of the spectrum that present a significant shape corresponding to a predefined shape criterion of said gaseous species in said mixture, andsubsequently comparing said pruned spectrum with the library of reference optical spectra, and determining the presence of gaseous species based on the comparing, wherein said detecting of said gaseous species is implemented in real-time.
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Abstract
A method of detecting gaseous species in a mixture by light-emission spectroscopy, in which use is made of the radiation emitted by a plasma (4) present in the gas mixture under analysis, a measurement system (20) is used to take a raw optical spectrum of said radiation emitted by the plasma (4), and the raw optical spectrum is compared with a library of reference optical spectra, the method comprising a step of generating a pruned optical spectrum, which step consists in making use, in the raw optical spectrum, of only those zones of the spectrum that present a significant shape corresponding to a predefined shape criterion, and subsequently said pruned spectrum is compared with the library of reference optical spectra.
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Citations
13 Claims
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1. A method of detecting gaseous species in a mixture by light-emission spectroscopy, in which use is made of the radiation emitted by a plasma present in the gas mixture under analysis, a measurement system is used to take a raw optical spectrum of said radiation emitted by the plasma, and the raw optical spectrum is compared with a library of reference optical spectra, the method comprising:
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generating a pruned optical spectrum, including making use, in the raw optical spectrum, of only those zones of the spectrum that present a significant shape corresponding to a predefined shape criterion of said gaseous species in said mixture, and subsequently comparing said pruned spectrum with the library of reference optical spectra, and determining the presence of gaseous species based on the comparing, wherein said detecting of said gaseous species is implemented in real-time. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. Apparatus for implementing a method of detecting gaseous species in a mixture by light-emission spectroscopy, in which use is made of the radiation emitted by a plasma present in the gas mixture under analysis, a measurement system is used to take a raw optical spectrum of said radiation emitted by the plasma, and the raw optical spectrum is compared with a library of reference optical spectra, the apparatus comprising;
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a plasma source for generating a plasma in the gas mixture under study, means for picking up and transmitting to an optical spectrometer the radiation emitted by the plasma, a computer for analyzing the signals emitted by the optical spectrometer, the computer comprising a central unit and a program recorded in a program memory, said program containing the sequence of instructions for implementing said method, wherein said method includes the steps of; generating a pruned optical spectrum, including making use, in the raw optical spectrum, of only those zones of the spectrum that present a significant shape corresponding to a predefined shape criterion of said gaseous species in said mixture, and subsequently comparing said pruned spectrum with the library of reference optical spectra, and determining the presence of gaseous species based on the comparing, wherein said detecting of said gaseous species is implemented in real-time. - View Dependent Claims (13)
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Specification