Evaluation apparatus and evaluation method
First Claim
1. An evaluation apparatus which evaluates a sample, the apparatus comprising:
- a light source which irradiates the sample with light;
an imaging spectrometer which spectroscopically measures light reflected by the sample and senses an image;
a first calculator which obtains amplitude information on an amplitude of a spectral reflectance of the sample based on the image sensed by the imaging spectrometer within a predetermined wavelength range of spectral reflectance spectra obtained by the spectrometer;
a memory which holds in advance relationship information representing a relationship between the amplitude information of the spectral reflectance and an absorption coefficient; and
a second calculator which obtains an absorption coefficient of the sample based on the amplitude information obtained by the first calculator and the relationship information held in the memory;
wherein the relationship information includes information representing a relationship between amplitude information of a spectral reflectance of a sample having a porous layer and an absorption coefficient of the porous layer.
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Abstract
An evaluation apparatus which evaluates a sample. The apparatus includes a light source which irradiates the sample with light, an imaging spectrometer which spectroscopically measures light reflected by the sample and senses an image, a first calculator which obtains amplitude information on an amplitude of a spectral reflectance of the sample based on the image sensed by the imaging spectrometer within a predetermined wavelength range of spectral reflectance spectra obtained by the spectrometer, a memory which holds in advance relationship information representing a relationship between the amplitude information of the spectral reflectance and an absorption coefficient, and a second calculator which obtains an absorption coefficient of the sample based on the amplitude information obtained by the first calculator and the relationship information held in the memory.
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Citations
10 Claims
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1. An evaluation apparatus which evaluates a sample, the apparatus comprising:
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a light source which irradiates the sample with light; an imaging spectrometer which spectroscopically measures light reflected by the sample and senses an image; a first calculator which obtains amplitude information on an amplitude of a spectral reflectance of the sample based on the image sensed by the imaging spectrometer within a predetermined wavelength range of spectral reflectance spectra obtained by the spectrometer; a memory which holds in advance relationship information representing a relationship between the amplitude information of the spectral reflectance and an absorption coefficient; and a second calculator which obtains an absorption coefficient of the sample based on the amplitude information obtained by the first calculator and the relationship information held in the memory; wherein the relationship information includes information representing a relationship between amplitude information of a spectral reflectance of a sample having a porous layer and an absorption coefficient of the porous layer. - View Dependent Claims (2, 3, 4, 5)
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6. An evaluation method of evaluating a sample, the method comprising:
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an imaging spectrometry step of spectroscopically measuring light reflected by the sample irradiated with light and sensing an image; a first calculation step of obtaining amplitude information on an amplitude of a spectral reflectance of the sample based on the image sensed in the imaging spectrometry step within a predetermined wavelength range of spectral reflectance spectra obtained in the spectrometry step; and a second calculation step of obtaining an absorption coefficient of the sample based on the amplitude information obtained in the first calculation step, and relationship information which is held in a memory in advance and represents a relationship value between the amplitude information of the spectral reflectance and an absorption coefficient; wherein the relationship information includes information representing a relationship between amplitude information of a spectral reflectance of a sample having a porous layer and an absorption coefficient of the porous layer. - View Dependent Claims (7, 8, 9, 10)
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Specification