Spot array generation using a MEMS light modulator
First Claim
1. Apparatus, comprising a device having one or more elemental device units, wherein each unit comprises:
- first and second films movably coupled to a base, said first and second films being arranged to define a tunable cavity, wherein;
the first film is adapted to be moved with respect to the base; and
the second film is adapted to be moved with respect to the base and with respect to the first film, wherein the device is a spatial light modulator (SLM), wherein, for each unit, the tunable cavity is adapted to receive an optical input beam and form a reflected beam having an amplitude and a phase, wherein each unit is adapted to;
(i) change the amplitude by changing separation between the first and second films and (ii) change the phase by changing position of the cavity with respect to the base.
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Abstract
An optical system having a spatial light modulator (SLM), in which each pixel has an optical cavity and is adapted to: (i) change the intensity of a reflected beam by changing the size of the cavity and (ii) change the phase of the reflected beam by changing the position of the cavity with respect to a reference plane. In one embodiment, the optical system has optics configured to image the apertures of an optical input mask onto the pixels of the SLM and to form an optical spot array by imaging the light reflected by the pixels onto a plane orthogonal to the plane of the mask. Each aperture can be configured to have a transmission pattern to spatially modulate the light imaged onto the corresponding pixel, thereby enabling control of the spatial mode at the corresponding spot in the optical spot array.
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Citations
18 Claims
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1. Apparatus, comprising a device having one or more elemental device units, wherein each unit comprises:
first and second films movably coupled to a base, said first and second films being arranged to define a tunable cavity, wherein; the first film is adapted to be moved with respect to the base; and the second film is adapted to be moved with respect to the base and with respect to the first film, wherein the device is a spatial light modulator (SLM), wherein, for each unit, the tunable cavity is adapted to receive an optical input beam and form a reflected beam having an amplitude and a phase, wherein each unit is adapted to;
(i) change the amplitude by changing separation between the first and second films and (ii) change the phase by changing position of the cavity with respect to the base.- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. Apparatus, comprising a device having one or more elemental device units, wherein each unit comprises:
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means for moving a first film with respect to a base; and means for moving a second film with respect to said base and with respect to said first film, wherein said first and second films are parts of said unit and are movably coupled to said base to define a tunable cavity , wherein the device is a spatial light modulator (SLM), wherein, for each unit, the tunable cavity is adapted to receive an optical input beam and form a reflected beam having an amplitude and a phase, wherein each unit is adapted to;
(i) change the amplitude by changing separation between the first and second films and (ii) change the phase by changing position of the cavity with respect to the base.
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16. Apparatus, comprising a device having one or more elemental device units, wherein each unit comprises:
first and second films movably coupled to a base, said first and second films being arranged to define a tunable cavity, wherein; the first film is adapted to be moved with respect to the base; and the second film is adapted to be moved with respect to the base and with respect to the first film, wherein the device further comprises; a first platform adapted to move with respect to the base, wherein the first film is fixedly attached to the first platform; and a second platform mounted on the first platform and adapted to move with respect to the first platform, wherein the second film is fixedly attached to the second platform. - View Dependent Claims (17, 18)
Specification