×

Spot array generation using a MEMS light modulator

  • US 7,468,828 B2
  • Filed: 10/19/2006
  • Issued: 12/23/2008
  • Est. Priority Date: 10/19/2006
  • Status: Active Grant
First Claim
Patent Images

1. Apparatus, comprising a device having one or more elemental device units, wherein each unit comprises:

  • first and second films movably coupled to a base, said first and second films being arranged to define a tunable cavity, wherein;

    the first film is adapted to be moved with respect to the base; and

    the second film is adapted to be moved with respect to the base and with respect to the first film, wherein the device is a spatial light modulator (SLM), wherein, for each unit, the tunable cavity is adapted to receive an optical input beam and form a reflected beam having an amplitude and a phase, wherein each unit is adapted to;

    (i) change the amplitude by changing separation between the first and second films and (ii) change the phase by changing position of the cavity with respect to the base.

View all claims
  • 7 Assignments
Timeline View
Assignment View
    ×
    ×